Concentration management device for chemical solution, regeneration unit, and charge calculation method and system

A technology of management device and calculation method, applied in the direction of manufacturing calculation system, calculation, measurement device, etc., can solve problems such as difficulty in earning profits

Pending Publication Date: 2018-12-07
HIRAMA LAB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] Therefore, the user of the chemical solution must bear the temporary huge cost burden for purchasing the concentration management device and the chemical solution regeneration device, as well as various efforts and burdens involved in the operation and maintenance management after the purchase.
In addition, there is also a problem that it is difficult for device sellers to earn sufficient profits if they do not repeatedly find drug users who wish to purchase devices in a limited market and sell the devices.

Method used

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  • Concentration management device for chemical solution, regeneration unit, and charge calculation method and system
  • Concentration management device for chemical solution, regeneration unit, and charge calculation method and system
  • Concentration management device for chemical solution, regeneration unit, and charge calculation method and system

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Embodiment Construction

[0037] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings as appropriate. However, unless otherwise specified, the shapes, sizes, dimensional ratios, relative arrangements, and the like of devices described in these embodiments are not limited to the examples shown in the scope of the present invention. These examples are only schematically illustrated as explanatory examples.

[0038] In addition, in the following description, as a specific example of a chemical solution used in the manufacturing process of a semiconductor or a liquid crystal display, 2.38 wt % (hereinafter, wt % is simply described as %) of a tetramethylammonium hydroxide aqueous solution (hereinafter, tetramethylammonium hydroxide is referred to as TMAH) will be described.

[0039] Wherein, the medicinal solution used in the present invention is not limited thereto. Examples of other chemical solutions to which the present invention can b...

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Abstract

The invention provides a concentration management device used to provide a service for managing the concentration of a chemical solution for manufacturing a semiconductor and a liquid crystal displaysubstrate, a chemical solution regeneration unit for providing a service for regenerating a chemical solution, a method system for calculating charge related to services to be provided. The concentration management device 1 is provided with accumulated flow meters 51 to 53 in a piping for replenishing replenisher. The chemical solution regeneration unit 2 includes an accumulated flow meter 54 in apiping for supplying a regenerating chemical solution. The charge for concentration management or regeneration processing of the chemical solution is calculated based on the accumulated flow rate during the predetermined period measured by the accumulated flow meters. Accumulated flow meters 221 to 225 are connected to a network 201 by having a communication function. The accumulated flow rate isreceived and stored in a server system 202 through the network. The server system 202 includes a calculating unit 205 that calculates the charge based on the accumulated flow rate for each accumulated flow meter for a predetermined period.

Description

technical field [0001] The present invention relates to a chemical solution concentration management device that manages the concentration of various chemical solutions that are repeatedly used in the manufacturing process of semiconductors or liquid crystal display substrates, and to a service that uses the concentration management device to manage the concentration of supplied chemical solutions The method for calculating the concentration management fee of liquid medicine and the calculation system of the concentration management fee. The present invention relates to a chemical solution regenerating device for regenerating various chemical solutions used in the manufacturing process of semiconductors or liquid crystal display substrates, and to regeneration treatment of chemical solutions in services for regenerating supplied chemical solutions using the chemical solution regenerating device Cost calculation method and regeneration treatment cost calculation system. Backg...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06Q30/02G01F15/07
CPCG01F15/07G06Q30/0283Y02P90/02Y02P90/30G03F7/30G03F7/42G03F7/70483H01L21/6715
Inventor 中川俊元
Owner HIRAMA LAB
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