System and method for testing defect laser-damaged threshold of optical thin film

Abstract

The invention discloses a system for testing a defect laser-damaged threshold of an optical thin film, and the system comprises a laser, an attenuator, a beam splitter, an energy meter, a beam qualityanalyzer, a focusing lens, a CCD camera, a metal film, an optical thin film, a moving platform, a scanning electron microscope and a computer, wherein the laser, the attenuator, the beam splitter, the energy meter, the beam quality analyzer, the focusing lens, the CCD camera, the metal film, the optical thin film, the moving platform, the scanning electron microscope and the computer are sequentially placed according to an optical path. A laser beam emitted by the laser passes through the attenuator to reach the beam splitter. The laser beam in the transmission direction of the beam splitterpasses through the focusing lens to reach the metal film, and the CCD camera records the spot position of the laser irradiation on the surface of the metal film and the coordinates of the laser damagepoint when laser irradiation is on the surface of the optical thin film. The scanning electron microscope records the longitudinal depth position of the laser damage point of the optical thin film, and completes the combination analysis of the subdivision of the lateral energy density of the defect damage point and the normalization processing of a longitudinal electric field. The system can solve a problem caused by a condition that the peak energy density is taken as the defect damage density, thereby improving the testing precision.

Description

technical field [0001] The invention belongs to the field of optical detection, and in particular relates to a test system and a test method for the laser damage threshold of optical film defects. Background technique [0002] Optical thin films are widely used in high-power laser systems, but the laser damage of optical thin films has always been a bottleneck limiting their development. An accurate laser damage threshold not only provides a safe range of use for optical films, but also a prerequisite for research on how to improve their resistance to laser damage. [0003] Under long-pulse laser irradiation, the laser damage of optical films is mainly caused by the defects in the optical films, and the laser damage threshold caused by defects is much smaller than the laser damage threshold corresponding to intrinsic damage. However, the international standard laser damage threshold test method regards the uneven distribution of defect damage as equivalent to the Gaussian d...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the problems existing in the prior art, the present invention provides a testing system and testing method for the laser damage threshold of optical film defects. Evenly distributed, and the peak energy density is used as the problem caused by the defect damage density, thereby improving the test accuracy

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