Semiconductor production remote monitoring system based on OCR image processing technology

Abstract

The invention discloses a semiconductor production remote monitoring system based on an OCR image processing technology. The system comprises a client system used for controlling production of machinetable equipment, and a central control server used for user management and operation; the client system comprises an OCR image processing module, a remote monitoring module, a formula configuration module, a data acquisition module, an alarm management module and a log processing module; the client system interacts with the machine table equipment through a USB interface, reads parameters of themachine table equipment and sends an instruction to control the machine table equipment to act; and the central control server is connected with the client system through a TCP / IP protocol-based Socket programming interface to control operation of the client system. The system solves the problem that the machine table equipment not supporting an SECS / GEM communication interface in a semiconductorenterprise achieves remote monitoring of automatic production, so that the full-automatic production level of semiconductor packaging is improved and the production cost is reduced.

Description

technical field [0001] The invention relates to a remote monitoring system, in particular to a semiconductor production remote monitoring system based on OCR image processing technology. Background technique [0002] With the continuous development of the computer integrated manufacturing system (CIMS), more and more semiconductor manufacturers are turning their attention to the direction of automated production, and strive to solve the increasingly high cost of semiconductor manufacturing and the manufacturing process through automated production. An increasingly complex problem with technology. [0003] At present, most of the equipment of semiconductor enterprises support SECS / GEM communication interface, and still adopt the automatic production solution based on SECS / GEM communication protocol, because the SECS / GEM communication protocol unifies each production equipment and between production equipment and control equipment The communication specification is the most w...

AI Technical Summary

Problems solved by technology

[0002] With the continuous development of the computer integrated manufacturing system (CIMS), more and more semiconductor manufacturers are turning their attention to the direction of automated production, and strive to solve the increasingly high cost of semiconductor manufacturing and the manufacturing process through automated production. The problem of increasing technological complexity

[0003] At present, most of the equipment of semiconductor enterprises support SECS / GEM communication interface, and still adopt the automatic production solution based on SECS / GEM communication protocol, because the SECS / GEM communication protocol unifies each production equipment and between production equipment and control equipment The communication specification is the most widely used semiconductor communication protocol at present. However, many semiconductor packaging and testing companies still have a large number of machines that do not support the SECS / GEM communication interface, resulting in a reduction in the level of automated production and production costs. a substantial increase in

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