Atomic Force Microscopy Probe Setup

An atomic force microscope and probe technology, used in measuring devices, scanning probe technology, scanning probe microscopy, etc., to achieve the effect of improving the success rate, promoting sensitivity, and improving test results
CN109061232BActive Publication Date: 2020-03-10HENAN UNIVERSITY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HENAN UNIVERSITY
Publication Date
2020-03-10

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Abstract

The invention discloses a combination device of an atomic force microscope probe and a base, wherein a step hole is formed in the surface, opposite to a needle point, of a micro-cantilever of the probe; a probe base comprises an adsorption part and a positioning part, wherein the adsorption part comprises a vacuum adsorption groove and an adsorption surface; the positioning part extends out of theadsorption surface and is inserted into the step hole and is rotated to abut against the stepped surface of the step hole; the positioning part comprises a rotating rod and a rotating strip which areconnected with each other, and an elastic assembly is arranged on the upper surface of the rotating strip; a fine adjustment structure is connected with the rotating rod and a fine adjustment nut through a connecting rod; and the fine adjustment nut controls the fine adjustment structure to drive the positioning part to move. According to the device, the needle replacing efficiency can be improved, the needle falling off and dislocation are avoided, a fixed acting force can be exerted on the tail end of the probe micro-cantilever, the sensitivity of the probe micro-cantilever is promoted, andthe testing effect is improved.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor testing, in particular to a probe device of an atomic force microscope. Background technique

[0002] Atomic Force Microscope (AFM) has been widely used in the testing of semiconductor samples. Its working principle is to study the extremely weak interatomic interaction force between the surface of the sample to be tested and a miniature force sensitive element (probe). The surface structure and properties of matter. Generally speaking, the probe includes a needle tip and a micro-cantilever. The end of the micro-cantilever, which is extremely sensitive to weak force, is fixed on the probe base, and the tip of the micro-cantilever is close to the surface of the sample. When the distance between the needle tip and the sample surface is very small, there will be very weak attraction or repulsion between their atoms, which will cause the deformation of the micro-cantilever or the change of the ...

Claims

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