An acceleration-sensitive mechanism based on mechanical metamaterials and a composite-sensitivity micromachined accelerometer

Abstract

The invention discloses an acceleration sensitive mechanism based on mechanical metamaterial and a composite sensitivity micromechanical accelerometer. The accelerometer comprises an acceleration sensitive mechanism, a displacement sensing mechanism, and a sensitivity switching actuator; the acceleration sensitive mechanism comprises a mass, a folded beam and a mechanical metamaterial periodic structure; one end of the folded beam and one end of the mechanical metamaterial periodic structure are respectively connected to the two ends of the mass; the folded beam is used to provide the positivestiffness to the acceleration sensitive mechanism; the mechanical metamaterial periodic structure is used to provide positive and negative stiffness which are changed with the displacement; the sensitivity switching actuator is used to control the mass to move to different stiffness regions. The acceleration sensitive mechanism based on mechanical metamaterial and the composite sensitivity micromechanical accelerometer adopts a serial connection manner of the mechanical metamaterial periodic structure and the folded beam to form a flexible structure having a plurality of stress-strain linearregions with different slopes; the flexible structure of the acceleration sensitive mechanism can have different stiffness at different positions, thus has multiple sensitivities.

Description

technical field [0001] The invention belongs to the technical field of micromechanical inertial instruments, and more specifically relates to a composite sensitivity micromechanical accelerometer based on mechanical metamaterials. Background technique [0002] Micromechanical (MEMS) accelerometer, as an inertial measurement element, has the advantages of small size, light weight, low cost, low power consumption and strong overload resistance, and has been widely used in many fields that require inertial measurement. However, when there is a multi-segment acceleration with greatly different amplitudes in a physical process that needs to be measured, the existing single micromachined acceleration sensor cannot meet the application requirements. For example, the precise guidance of a strategic rocket needs to measure the acceleration of the active section as large as tens of g, and the orbital disturbance acceleration as small as sub-μg in the passive section; the gravity measu...

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Problems solved by technology

[0003] Aiming at the defects of the prior art, the object of the present invention is to provide a micromachined accelerometer with multi-level sensitivity that can widen the dynamic measurement range, aiming to solve the problem that a single MEMS accelerometer in the prior art cannot meet the needs of measuring more than 10 4 g acceleration and less than 10 -4 The problem of the application of the acceleration of g

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