Pneumatic control constant pressure self-adaptive polishing grinding head

Abstract

The invention relates to a pneumatic control pressure constant pressure self-adaptive polishing grinding head, comprising a spindle sleeve, a connecting flange, a fastening screw, a set screw, a piston, a sealing ring, a linear bearing, a roller, a tool spindle, a limiting flange, a grinding disc base, a flexible layer and a polishing layer; the piston and the tool spindle are coaxially and closely matched to realize sliding connection for ensuring airtightness; the air pressure enters the cylinder through the spindle sleeve to form an air spring to push the tool spindle, and the elastic coefficient of the air spring can be changed through adjusting the air pressure in the cylinder; the tool spindle is restricted in rotation and capable of freely sliding in an axial direction to compensatethe axial runout of the grinding head, and the polishing pressure is constant; the flexible layer and the polishing layer are arranged in sequence below the grinding disc base, and pressure distribution on the contact spot of the grinding head and a workpiece is uniform. The pneumatic control pressure constant pressure self-adaptive polishing grinding head has the characteristics of simple structure, constant and controllable pressure, and tight attachment to a surface to be machined, and is suitable for high-precision polishing of surfaces such as aspherical surfaces and free-form surfaces.

Description

technical field [0001] The invention relates to an air pressure control constant pressure self-adaptive polishing grinding head, which belongs to the technical field of advanced optical manufacturing. Background technique [0002] Aspheric surfaces play a significant role in the optimization of optical systems, such as correcting aberrations, improving image quality, expanding the field of view, simplifying system structure and reducing system size and weight, so they are widely used in various high-performance optical systems. Especially in the projection lithography objective lens system, high-precision aspheric optical parts are indispensable. However, precision aspheric polishing technology is a difficult point of manufacture. Since the aspheric surface has a unique optical axis, and the curvature radius of each point on the aspheric surface is significantly different, it is difficult for the polishing grinding head to perfectly match the aspheric surface. At the same ...

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Problems solved by technology

[0006] The invention proposes an air pressure control constant pressure self-adaptive polishing grinding head, aiming to solve the technical problems existing in the prior art such as unstable polishing pressure and uneven pressure distribution caused by the mismatch between the surface of the grinding head and the surface of the workpiece, and reduce the polishing pressure. The medium and high frequency errors introduced in the process

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