Mask net tensioning device, evaporation device, net tensioning method and evaporation method

Abstract

The invention discloses a mask net tensioning device, an evaporation device, a net tensioning method and an evaporation method. The net tensioning device comprises tension applying mechanisms, a guidemechanism, a mask net shape measuring unit and a tension control unit; the tension applying mechanisms are drive the two opposite sides of mask nets move opposite or same to each other; the guide mechanism is used for providing guide for the movement of the mask nets; the mask net shape measuring unit corresponds to the mask nets in position; the tension control unit is connected with the mask net shape measuring unit and the tension applying mechanisms. The flatness and the drooping deformation of the mask nets are measured through the mask net shape measuring unit, and the tension control unit is used for fitting the measured data, the tensioning force to be controlled is obtained, the tension application mechanism is used for controlling the tension application mechanism, and meanwhile, the tension applying mechanisms drive the guide mechanism to move and specified tensioning forces are applied to the mask nets, so that the problem of drooping of the mask nets is solved, meanwhile,automatic adjustment and control of the tension of the mask nets are achieved, the control precision is improved, the rejection rate and the manufacturing cost of the mask nets are reduced, and the yield is improved.

Description

technical field

[0001] The invention relates to the field of display technology, in particular to a mask net stretching device, an evaporation device and a net stretching method. Background technique

[0002] At present, the mainstream production method of AMOLED (Active-matrix organic light-emitting diode, active-matrix organic light-emitting diode, active-matrix organic light-emitting diode) is evaporation. However, with the development of demand for low-cost and large-size AMOLED screens, the stretching network technology as a supporting process for evaporation has become a bottleneck problem for evaporation technology, and at the same time restricts the development of AMOLED to a higher generation.

[0003] The traditional netting process uses a netting machine to tension the mask net, measure the shape of the mask net at any time during the tensioning process, and adjust the tension in real time. After the netting is completed, the mask net is welded on the screen fram...

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