A method for ammonia extraction and reuse in LED-MOCVD process tail gas membrane and adsorption coupling

Abstract

The invention discloses an LED (light emitting diode)-MOCVD (metal organic chemical vapor deposition) processing tail gas film and a method for recycling ammonia extracted by adsorption coupling. Rawgas is pretreated and then enters a pervaporation membrane process, the generated impermeable gas enters a pressure swing adsorption process, the obtained non-adsorbed phase gas is nitrogen-hydrogen mixed intermediate gas, is directly output, incinerated and discharged, or enters a fine deamination and pressure swing adsorption separating unit to further recycle hydrogen gas and / or nitrogen gas, whereas the obtained adsorbed phase gas is ammonia-containing condensed gas, which is subjected to blast or compression to be mixed with the raw gas to directly enter the pervaporation membrane processto further recycle ammonia, hydrogen gas and / or nitrogen gas. The technical problem that ammonia-containing exhaust gas recycled at normal pressure or low pressure in an LED-MOCVD process cannot go back to the LED-MOCVD process to be further used is solved, thereby filling the blank for the green and cyclic economy development of LED industry.

Description

technical field [0001] The present invention relates to the electronic environmental protection field of ammonia NH3 preparation in the manufacturing process of semiconductor light-emitting diode LED and recycling of NH3 in waste gas, and more specifically relates to a kind of LED-MOCVD metal oxide chemical vapor deposition tail gas film separation and transformation A method for recovering and reusing ammonia extracted by pressure adsorption. Background technique [0002] MOCVD metal oxide chemical vapor deposition process equipment is a modern method and means for the research and production of compound semiconductor materials, especially as a method and equipment for the industrial production of new light-emitting materials-light-emitting diodes. Its high quality, high stability, high Repeatability and large-scale are irreplaceable by other semiconductor material growth methods and equipment. It is the main method and means of producing optoelectronic devices and microwav...

AI Technical Summary

Problems solved by technology

[0011] Other methods, such as the catalytic combustion method, use catalytic fuel to catalyze and oxidize combustible components such as ammonia, hydrogen, and methane in the tail gas at high temperature, and perform follow-up treatment to meet the emission standards, and cannot recover ammonia for reuse; catalytic ammonia decomposition method is The tail gas with high ammonia concentration is catalytically decomposed into H2 and N2 at high temperature, and the H2 or N2 is recovered after treatment, and the ammonia cannot be recovered and reused;

[0012] In a series of existing ultra-pure ammonia preparation methods, that is, using 99.95% industrial anhydrous ammonia as a raw material to prepare more than 99.999% of electronic ammonia gas, there are adsorption methods, rectification methods, adsorption + rectification methods, chemical catalysis method (dehydration), metal getter method and its coupling, but they cannot directly recycle and reuse ammonia-containing waste gas

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