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FIB (focused ion beam) sample holder

A technology of sample holder and body, which is applied in the field of failure analysis of the semiconductor chip manufacturing industry, can solve the problem that the sample holder cannot place sectional TEM samples and planar TEM samples FIB marked samples at the same time, so as to reduce time, prolong service life and improve efficiency Effect

Active Publication Date: 2019-02-15
SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The technical problem to be solved by the present invention is to provide a FIB sample holder, which can solve the problem that the existing sample holder cannot simultaneously place a cross-sectional TEM sample, a planar TEM sample, and a FIB-marked sample and need to meet the height of the confocal point

Method used

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  • FIB (focused ion beam) sample holder
  • FIB (focused ion beam) sample holder
  • FIB (focused ion beam) sample holder

Examples

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Effect test

no. 1 example

[0039] In this example, if Figure 4 to Figure 6 As shown, three of the four sides of the sample holder body 1 are perpendicular to the bottom surface, and the angle α between the remaining one side and the bottom surface is 40°-55°. Specifically, such as Figure 7 As shown, the top surface 11 is parallel to the bottom surface, the angle α between the first side surface 12 and the bottom surface is 40°-55°, and the other three sides are perpendicular to the bottom surface.

[0040] Such as Figure 7 As shown, on the sample holder body of this embodiment, the FIB marked sample 5 can be adhered to the first side 12 with an angle of 40° to 55° with the bottom surface with conductive silver glue, and the cross-sectional TEM sample 3 can be glued with conductive silver glue. Adhesive on the top surface 11, the plane TEM sample 4 is adhered on the remaining three sides with conductive silver glue, that is, the second side 13 opposite to the first side 12 and the first side 12, the...

no. 2 example

[0044] Different from the first embodiment, two of the four sides of the sample holder body are perpendicular to the bottom surface, and the angle α between the other two sides and the bottom surface is 40° to 55°, wherein the top surface is used to place the cross-sectional TEM. For the sample, the side with an angle of 40°-55° to the bottom surface can be used to place FIB-marked samples, and the side perpendicular to the bottom surface can be used to place planar TEM samples.

no. 3 example

[0046]Similar to the second embodiment, one of the four sides of the sample holder body is perpendicular to the bottom surface, and the angle α between the remaining three sides and the bottom surface is 40°-55°. Among them, the top surface is used to place cross-sectional TEM samples, the side with an angle of 40°-55° to the bottom surface can be used to place FIB-marked samples, and the side perpendicular to the bottom surface can be used to place planar TEM samples.

[0047] The sample holder of the present invention can place plane TEM samples, cross-sectional TEM samples and FIB marked samples at the same time, thereby improving the efficiency of failure analysis of physical properties, prolonging the service life of threaded connections, maintaining the FIB vacuum value to improve the resolution of FIB electron beams; at the same time FIB-marked samples can be placed on the side that forms an angle with the bottom surface at the same time, thereby reducing the time for co...

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Abstract

The invention discloses an FIB (focused ion beam) sample holder which comprises a sample holder body and a base, wherein the sample holder body and the base are in an integral structure; the sample holder is made of antimagnetic conductive metal; the sample holder body is in a hexahedron structure; the bottom surface and the top surface of the hexahedron are parallel to each other; at least one offour side surfaces is vertical to the bottom surface, and an included angle alpha between at least one of the four side surfaces and the bottom surface is 40-50 degrees. The sample holder disclosed by the invention can be used for placing a plane TEM (transmission electron microscopy) sample, a cross section TEM sample and an FIB marked sample at the same time, so that the efficiency of a physical failure analysis can be improved, the service life of threaded connection is prolonged, and the FIB vacuum value is maintained to improve the resolution ratio of FIB electron beams; meanwhile, the side surface(s) forming the included angle(s) with the bottom surface can be used for placing the FIB marked sample at the same time, so that the time of adjusting the common focus point height (Eucentric Height) is shortened.

Description

technical field [0001] The invention belongs to the field of failure analysis in the semiconductor chip manufacturing industry, and in particular relates to a FIB sample holder, which can simultaneously prepare a section TEM sample, prepare a plane TEM and position the FIB sample. Background technique [0002] With the continuous development and progress of semiconductor technology, the size of device research and development has become smaller and smaller, thus improving the ability to analyze sample structures and materials. Focused Ion Beam (hereinafter referred to as FIB) is commonly used in the field of failure analysis of the semiconductor chip manufacturing industry to prepare transmission electron microscope (Transmission Electron Microscopy, hereinafter referred to as TEM) samples, mark and perform circuit repair. Divided into the preparation of cross-sectional TEM samples and the preparation of planar TEM samples. [0003] At present, the FIB sample holder is a ci...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/2204
CPCG01N23/2204
Inventor 尹圣楠史燕萍
Owner SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD
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