Damper of turbo molecular pump

Abstract

The invention discloses a damper of a turbo molecular pump. The damper comprises a first flange, a first cylinder, a stainless steel bellow, a rubber filling material, a second cylinder and a second flange. According to the damper of the turbo molecular pump, the upper and lower flanges are sealingly connected with a scanning electron microscope sample chamber and the turbo molecular pump respectively, and through cooperation of the stainless steel bellow and the rubber filling material, the situation can be effectively prevented that vibration generated by the turbo molecular pump in the operation process is transmitted to the scanning electron microscope sample chamber. According to the damper, the aim of damping for the turbo molecular pump is achieved, the turbo molecular pump is installed and fixed, and the complexity in the assembly process is greatly simplified.

Description

technical field [0001] The invention relates to a shock absorber device, in particular to a device for reducing the transmission of vibration generated during the operation of a turbomolecular pump to a sample chamber of a scanning electron microscope. Background technique [0002] The magnification of the electron microscope is as high as hundreds of thousands of times. Any vibration of the sample will directly affect the imaging quality. This requires the sample stage on which the sample is placed to have high stability. However, in order to observe the sample from multiple angles and positions, modern electron microscopes Most of the sample stages are designed with 5-axis cantilever, which requires the use of linear guideways. These parts have low damping characteristics and will generate small vibrations. [0003] The scanning electron microscope requires to work in a vacuum environment, and it needs to use the turbomolecular pump to work continuously. The molecular pump...

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Problems solved by technology

[0002] The magnification of the electron microscope is as high as hundreds of thousands of times. Any vibration of the sample will directly affect the imaging quality. This requires the sample stage on which the sample is placed to have high stability. However, in order to observe the sample from multiple angles and positions, modern electron microscopes Most of the sample stages are 5-axis cantilever design, which requires the use of linear guide rails. These parts have low damping characteristics and will generate small vibrations

[0003] The scanning electron microscope requires to work in a vacuum environment, and it needs to use the turbomolecular pump to work continuously. The molecular pump obtains vacuum by the high-speed rotating turbine blades. The turbomolecular pump itself will vibrate. There is no shock absorber in between, which will seriously affect the image quality

[0004] The current damping measures have the problems of unsatisfactory damping effect, complicated installation and high cost.

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