A Linear Comb Structure Driven by Micromechanical Electrostatic

Abstract

A micromechanical electrostatically driven linear comb structure, which relates to the technical field of micromechanical electrostatic drive; it includes n groups of identical linear comb groups; n groups of linear comb groups are evenly distributed horizontally on the horizontal side walls of external devices ; Each set of linear combs includes static combs and moving combs; the static combs and moving combs are an E-shaped structure that is staggered; driven by external static electricity; the moving combs are along the horizontal side wall of the external device, The linear motion of approaching or moving away from the static comb teeth; when the static comb teeth cooperate with the moving comb teeth, the first moving electrode extends between the first fixed electrode and the second fixed electrode; the second moving electrode extends into the second fixed electrode and the third fixed electrode; the third moving electrode is arranged on the outside between the third fixed electrodes; the present invention achieves a larger driving stroke under the same vacuum environment and driving voltage as the traditional technology, and does not increase the difficulty of the process .

Description

technical field [0001] The invention relates to the technical field of micro-mechanical electrostatic drive, in particular to a linear comb structure for micro-mechanical electrostatic drive. Background technique [0002] Electrostatic drive is an important method of micro-mechanical drive technology, and it is widely used in the current MEMS field. At present, the most common structure in the electrostatic driving structure is a rectangular planar comb array structure. However, the current rectangular comb-tooth electrostatic driver has the problems of relatively small driving force and too high driving voltage. However, the application occasions of micro-electromechanical devices often have upper limit requirements on the driving voltage, and it is hoped to reduce the driving voltage as much as possible or increase the driving displacement. The common way to solve this contradiction is to increase the number of comb teeth to form an array. The disadvantage of increasing...

AI Technical Summary

Problems solved by technology

[0003] Invention patent application "A Comb Structure Driven by Micromechanical Electrostatics" (Application No. 201410440148.7) proposes that the shape of the comb adopts a combination of triangle and trapezoid, or a combination of triangle and rectangle, or a combination of trapezoids, reducing The driving voltage of the structure, but it is only applicable to the driving mode in which the driving displacement is perpendicular to the comb direction

Images