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Sensor and its preparation method, array substrate, display panel, display device

A display panel and sensor technology, applied in the fields of display devices, sensors and their preparation methods, display panels, and array substrates, can solve the problems of poor gas concentration detection effect, difficulty for gas to reach the carrier migration interface, and low sensitivity, and achieve Improve the detection effect, increase the contact area, and improve the sensitivity

Active Publication Date: 2021-01-08
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the limitations of the OTFT structure in the prior art, it is difficult for the gas to reach the carrier transfer interface, the sensitivity of gas concentration detection by OTFT is low, and the gas concentration detection effect is poor

Method used

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  • Sensor and its preparation method, array substrate, display panel, display device
  • Sensor and its preparation method, array substrate, display panel, display device
  • Sensor and its preparation method, array substrate, display panel, display device

Examples

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preparation example Construction

[0067] Corresponding to the sensor provided in the embodiment of the present application, the embodiment of the present application provides a method for preparing a sensor, including the steps of setting the source, drain and gate of the thin film transistor structure, and the method also includes:

[0068] A gas bearing structure is provided, and the gas bearing structure is provided with voids for bearing the gas to be measured.

[0069] In the sensor preparation method provided in the embodiment of the present application, since the gas carrying structure is provided with a gap for carrying the gas to be measured, when the sensor is manufactured by this method for gas concentration detection, the gas to be measured can enter the thin film transistor structure through the gap internally, thereby increasing the contact area between the gas and the carrier migration interface of the thin-film transistor structure, thereby improving the sensitivity of the thin-film transistor s...

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PUM

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Abstract

The application discloses a sensor and a preparation method thereof, an array substrate, a display panel, and a display device, which are used to improve the sensitivity of the sensor when detecting gas concentration and improve the detection effect. A sensor provided in an embodiment of the present application includes a thin film transistor structure, the thin film transistor structure includes a source, a drain, and a gate, and the thin film transistor structure further includes: a gas bearing structure disposed on the gate, The gas carrying structure is provided with a space for carrying the gas to be measured.

Description

technical field [0001] The present application relates to the technical field of thin film transistors, in particular to a sensor and a manufacturing method thereof, an array substrate, a display panel, and a display device. Background technique [0002] An organic thin film transistor (Organic Thin Film Transistor, OTFT) has the advantages of low cost, environmental friendliness, and easy large area. Gas sensors are essential elements in industrial production and smart homes. At present, sensor applications have been proven to be a better destination for OTFT technology. When the gas to be measured enters the carrier migration interface of the OTFT, it can affect the interface between the active layer and the insulating layer, thereby affecting the carrier migration speed of the OTFT, so that the carrier mobility of the OTFT decreases, and the carrier The degree of decline is related to the concentration of the gas. That is to say, when the OTFT encounters the gas to be me...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/05H01L51/10G01N27/414G02F1/1362H01L27/32H10K99/00
CPCG01N27/4141G02F1/1362H10K10/46H10K59/125H10K10/468H10K59/1213H10K85/113G01N27/414H10K10/462H10K10/84H10K59/00
Inventor 冯翔杨照坤王庆贺刘莎杨瑞智张强谢春燕邱云
Owner BOE TECH GRP CO LTD