Multi-degree-of-freedom sample rod

Abstract

The invention relates to a multi-degree-of-freedom sample rod. The sample rod is provided with a nano positioning device, wherein the nano positioning device comprises a driving part, the driving partis a piezoceramic tube, the piezoceramic tube is a hollow tube body, one end of the piezoceramic tube is fixedly connected with a joint ball, and the other end is installed on the sample rod; the piezoceramic tube is provided with an inner surface and an outer surface, one surface of the piezoceramic tube is provided with a plurality of conductive area groups, each conductive area group comprisestwo symmetric conductive areas, the conductive areas are independent from each other, and each conductive area is provided with a conductive wire; and the other surface of the piezoceramic tube is awhole area conductive part. The multi-degree-of-freedom sample rod has three degrees of freedom, i.e. translation along the axis X, translation along the axis Y and rotation along the axis Z and has the advantage that the performance is stable when in reutilization.

Description

technical field [0001] The invention relates to a sample rod used under an electron microscope and a transmission electron microscope. Background technique [0002] In situ observation techniques have a long history in transmission electron microscopy research. By applying various physical effects on the sample and using a transmission electron microscope (TEM) to observe the changes in the microstructure and chemical state of the material, it is possible to directly study the performance of the material or device in the actual use process. For the performance of the material The research has important practical significance. The difficulty of in-situ technology in transmission electron microscopy lies in not only accurately applying physical effects on the sample, but also meeting a series of stringent conditions, such as maintaining the ultra-high vacuum of the electron microscopy system and ensuring extremely high stability of the sample stage degree without interfering...

AI Technical Summary

Problems solved by technology

[0004] The disadvantages of this three-dimensional probe are: 1. The flexible claws are easy to deform. In order to maintain the friction between it and the ball, the shape of the flexible claws needs to be adjusted frequently, but there are many flexible claws, so it is impossible to ensure that each The consistency of the flexible wire claws, resulting in the lower and lower precision of the three-dimensional probe with the time and frequency of use

2. The length of the flexible wire claw makes there is a gap between the sample holder and the ball. When the ball circulates, the sample holder will move away from the ball or close to the ball along the wire claw, so as to realize the axial displacement of the sample. , but the sample holder is suspended on the ball through flexible wire claws, the sample holder and the sample on it will fall down due to gravity, and the position accuracy is not high

The field of view in the transmission electron microscope is at the nanometer and micron level, and the position deviation of the sample due to gravity is likely to cause the sample to deviate from the field of view of the electron microscope and cannot be observed; and the existence of position deviation makes it difficult to adjust the sample to a suitable position for observation. position and angle

3. When the probe clamping device moves back and forth along the axial direction of the piezoelectric ceramic tube, the relationship between the shape of the flexible wire claw and the above-mentioned frictional force is complicated, and it is difficult to ensure that the frictional force is always suitable by adjusting its shape

In addition, the probe clamping device is affected by gravity, which makes it easy to produce congruent motion during rough adjustment, and it is difficult to accurately control the probe; even due to improper adjustment of the shape of the flexible wire claw, the small ball cannot be grasped, which may cause the probe to clamp The device falls into the device, causing damage to the device

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