Cross-scale occluded foreign substance quick analyzing instrument and method based on microphotographing matrix

Abstract

The invention relates to a cross-scale full-automatic occluded foreign substance quick analyzing instrument and a method based on a microphotographing matrix. The analyzing instrument comprises a microphotographing matrix system, a high precision three-dimensional numerically controlled worktable, a computing working group and a control and data processing system. A to-be-tested sample is a largedimension metal member, the microphotographing matrix system can be movably fixed to the Z axis of the high precision three-dimensional numerically controlled worktable up and down, and the computingworking group controls the displacement of the high precision three-dimensional numerically controlled worktable according to the control and data processing system to move the position of the to-be-tested sample step by step, so that the microphotographing matrix system traverses to-be-tested surfaces of all to-be-tested samples to achieve full-scale microphotograph of the to-be-tested samples soas to carry out occluded foreign substance searching, area computing, positioning, shape graded amplification and statistic distribution analysis. By combining the microphotographing matrix with highspeed operation, the scanning dimension of the sample is large, the precision is high and the speed is high. The analyzing efficiency of the large scale sample occluded foreign substances is improvedobviously.

Description

technical field [0001] The invention belongs to the technical field of high-throughput microscopic characterization of material surfaces, and in particular relates to a cross-scale automatic inclusion rapid analysis instrument and method based on a microphotographic matrix. Background technique [0002] The key core components of major projects are usually large-scale metal components. Large-scale metal component inclusions are an important factor for the failure of key components in aviation, high-speed rail and other industries. At present, there is no automatic detection method for direct and rapid measurement of large-scale metal component inclusions at home and abroad. Conventional optical microscope metallographic methods can only detect inclusions on the surface of metal components within a size of 10mm×10mm. It is necessary to cut large-scale samples into samples suitable for ordinary metallographic analysis. Processing is time-consuming, laborious, inefficient, and...

AI Technical Summary

Problems solved by technology

Conventional optical microscope metallographic methods can only detect inclusions on the surface of metal components within a size of 10mm×10mm. It is necessary to cut large-scale samples into samples suitable for ordinary metallographic analysis. Processing is time-consuming, laborious, inefficient, and some surface parameters May be distorted due to cutting process

Therefore, ordinary metallographic microscopy techniques can only deal with small-sized samples, and cannot obtain metallographic information such as inclusions in cross-scale samples.

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