A method for modifying the plasma surface of nanomaterials

Abstract

The invention discloses a plasma surface modification method for a nanomaterial, and relates to the field of micro and nano fabrication in electronic, material, medicine and aerospace fields. The method includes 1) arranging a dielectric barrier discharging type plasma reactor; 2) arranging a substrate material in an air gap; 3) adding a working medium solution; and 4) exciting generation of plasma and allowing the plasma to act on the surface of the substrate material. The method combining heating, reacting and phase change deposition is provided and has advantage of wide-spectrum adaptability, flexibility and reliability. A material surface modification process can be achieved at room temperature or in a natural environment temperature range with a simple device without the need of sealing, and the method is suitable for modification of plurality of special-shape structures and large-area workpieces.

Description

Technical field [0001] The invention relates to the field of micro-nano processing in electronics, materials, medicine, and aerospace, in particular to a method for modifying the plasma surface of nano materials. Background technique [0002] The processing and preparation technology of nanomaterials is the core key to the application of nanotechnology and engineering, and is the key prerequisite for obtaining nanoscale effects and forming functional devices. However, for single-type, single-component nanomaterials, some cannot directly have excellent performance, and some will have better performance due to proper doping or combination with other types of nanostructures. Therefore, the surface modification of nanomaterials has received great attention in the industry, including doping inside the crystal lattice, depositing other types of nanostructures on the surface and forming an interface with other nanostructures, and adding chemical groups on the surface of the nanostructur...

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Problems solved by technology

However, for single-type, single-component nanomaterials, some cannot directly have excellent performance, and some will have better performance due to proper doping or combination with other types of nanostructures.

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