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Miniature Throttling Refrigerator Based on MEMS Processing Technology

A throttling refrigerator, micro-electromechanical system technology, applied in refrigerators, refrigeration components, refrigeration and liquefaction, etc., can solve the problem of not preventing the direct sublimation and deposition of impurity water molecules, reducing irreversible heat transfer loss and reducing processing. Difficulty, the effect of shortening the cooling time

Active Publication Date: 2020-07-28
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, adding an ice crystal filter layer in the heat exchanger cannot prevent impurity water molecules from directly desublimating and depositing in the throttle valve.
[0008] For the second problem, there is no relevant research to propose an improvement plan

Method used

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  • Miniature Throttling Refrigerator Based on MEMS Processing Technology
  • Miniature Throttling Refrigerator Based on MEMS Processing Technology
  • Miniature Throttling Refrigerator Based on MEMS Processing Technology

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Embodiment Construction

[0022] The present invention will be further described in detail in conjunction with the accompanying drawings, but this embodiment does not limit the present invention, and all similar structures and similar changes of the present invention should be included in the protection scope of the present invention.

[0023] figure 1 It is an exploded view of the structure of the miniature throttling refrigerator based on the micro-electromechanical system processing technology of the present invention. The refrigerator is welded into an integrated structure by successively stacking upper, middle and lower substrates (10, 20, 30). and the lower substrates (20, 30) jointly form a microchannel heat exchanger. see figure 2, (a), (b), and (c) are the schematic structural diagrams of each layer of substrates (10, 20, 30) respectively, and the corresponding positions at one end of each layer of substrates (10, 20, 30) are provided as working The through hole of the medium inlet 1 is pro...

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Abstract

The present invention proposes a micro-throttling refrigerator based on MEMS plus technology, which belongs to the technical field of micro-throttling refrigerators. The upper, middle, and lower substrates are welded into an integrated structure. Both are equipped with working medium inlets, and the upper substrate is also provided with working medium outlets; the middle part and the other end of the lower substrate are respectively provided with a first microchannel and a buffer chamber, and the first microchannel is a groove arranged in an S shape. One end of the microchannel communicates with the working medium inlet at one end of the lower substrate, and the other end communicates with one end of the buffer chamber; a second microchannel and a strip-shaped through hole are sequentially arranged on the middle substrate, and one end of the microchannel communicates with the working medium outlet of the upper substrate. The other end of the microchannel communicates with the buffer chamber through the strip-shaped through hole. The invention can effectively alleviate the blocking problem in the miniature throttling refrigerator, and can also strengthen the flow and heat exchange in the evaporation process while simplifying the processing procedure.

Description

technical field [0001] The invention belongs to the technical field of micro-throttling refrigerators, in particular to micro-throttling refrigerators based on micro-electromechanical system processing technology. Background technique [0002] Micro-throttling refrigerator based on micro-electro-mechanical system processing technology is a refrigeration device with the advantages of no vibration, no electromagnetic interference, no moving parts, and perfect coupling with the cooled device. This type of miniature throttling refrigerator has received extensive attention in the cooling of low temperature electronic devices (the low temperature here refers to the temperature below 120K) and in the research of low temperature materials science, such as: low / high temperature for assembling fast digital circuits Superconductor electronics, low / high temperature superconductor quantum interferometers for detecting weak magnetic field signals, gallium arsenide-based electronics for si...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F25B9/00F25B39/02F25B41/00F25B41/06F25B41/30
CPCF25B9/002F25B39/02F25B41/00F25B41/30
Inventor 曹海山
Owner TSINGHUA UNIV
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