Miniature Throttling Refrigerator Based on MEMS Processing Technology
A throttling refrigerator, micro-electromechanical system technology, applied in refrigerators, refrigeration components, refrigeration and liquefaction, etc., can solve the problem of not preventing the direct sublimation and deposition of impurity water molecules, reducing irreversible heat transfer loss and reducing processing. Difficulty, the effect of shortening the cooling time
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[0022] The present invention will be further described in detail in conjunction with the accompanying drawings, but this embodiment does not limit the present invention, and all similar structures and similar changes of the present invention should be included in the protection scope of the present invention.
[0023] figure 1 It is an exploded view of the structure of the miniature throttling refrigerator based on the micro-electromechanical system processing technology of the present invention. The refrigerator is welded into an integrated structure by successively stacking upper, middle and lower substrates (10, 20, 30). and the lower substrates (20, 30) jointly form a microchannel heat exchanger. see figure 2, (a), (b), and (c) are the schematic structural diagrams of each layer of substrates (10, 20, 30) respectively, and the corresponding positions at one end of each layer of substrates (10, 20, 30) are provided as working The through hole of the medium inlet 1 is pro...
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