Crystal oscillator lifetime determination method, film thickness measuring device, film forming method, film forming device, and electronic device manufacturing method

Abstract

The present invention relates to a life determination method of a crystal oscillator, a film thickness measuring device, a film forming method, a film forming device, and an electronic device manufacturing method. A method for determining the lifetime of a crystal oscillator according to an aspect of the present invention includes: a determination stage of measuring the equivalent series resistance value of the crystal oscillator; The calculation stage of calculating the variation value of the equivalent series resistance value based on the calculated equivalent series resistance value; the comparison stage of comparing the variation value of the equivalent series resistance value of the crystal oscillator with a predetermined threshold value; and A determination stage for determining the lifetime of the crystal oscillator based on the number of times the fluctuation value of the effective series resistance value exceeds the predetermined threshold value.

Description

technical field [0001] The present invention relates to a method for determining the life of a crystal oscillator used in a film thickness measuring device for measuring the film thickness and film formation rate of a vapor deposition material deposited on a substrate, a film thickness measuring device, a film forming method, and a film forming device and methods of manufacturing electronic devices. Background technique [0002] Recently, an organic EL display device has attracted attention as a flat panel display device. Organic EL display devices are self-luminous displays, which are superior in response speed, viewing angle, and thinner than liquid crystal panel displays. They are rapidly replacing monitors, TVs, and various portable terminals represented by smartphones. Existing LCD panel displays. In addition, its application fields have also expanded to automotive displays and the like. [0003] An element of an organic EL display device has a basic structure in whi...

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Problems solved by technology

[0005] However, as the vapor-deposited material accumulates on the crystal oscillator, the resonant frequency begins to decrease. If the vapor-deposited material accumulates to a certain thickness, the following phenomenon occurs: the resonant vibration of the crystal oscillator becomes unstable, or the crystal oscillator The impedance value of the crystal oscillator rises and the vibration energy of the crystal oscillator is lost so that the crystal oscillator can no longer maintain the resonant vibration

In this state, the film thickness cannot be continuously measured from the fluctuation value of the resonance frequency. Therefore, if such a phenomenon occurs, it is determined that the life of the crystal oscillator is exhausted, and the crystal oscillator is replaced.

[0006] In the prior art, in the determination of the lifetime of the crystal oscillator, the threshold value of the resonant frequency value or the impedance value of the crystal oscillator is predetermined, and if the resonant frequency value and the impedance value of the crystal oscillator are lower than or exceed the threshold value, it is determined that The life of the crystal oscillator is exhausted, but when the resonance frequency value or impedance value changes rapidly due to reasons such as noise, there is a problem that it is judged that the life of the crystal oscillator has reached

In addition, when the threshold value is set by mistake, there is a problem that the crystal oscillator that can still be used is judged to have reached the end of its life and replaced, or the crystal oscillator that has reached the end of its life is continued to be used, resulting in a decrease in film thickness or film formation rate. measurement becomes inaccurate

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