Hexapod Actuator Based on Piezoelectric Drive and Its Working Method
A technology of piezoelectric drive and working method, which is applied in the fields of ultrasound, MEMS, and piezoelectricity, and can solve problems such as inability to complete predetermined actions, loss of motion ability, and lack of actuators.
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[0040] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with specific embodiments.
[0041] The embodiment of the present invention provides a hexapod actuator device based on piezoelectric drive, including: a screw rod 1, a first phosphor bronze substrate 2, a titanium alloy substrate 3, a second phosphor bronze substrate 4, a metal foot 5, and a phosphor bronze circle Ring 6, annular piezoelectric ceramic sheet 7, first piezoelectric ceramic sheet group 8, and second piezoelectric ceramic sheet group 9.
[0042] The titanium alloy substrate 3 is a cuboid, and a circular through hole is arranged inside, and a screw thread is arranged inside the through hole to cooperate with the screw rod 1 . Four ceramic sheets of the same shape and size are pasted on the four sides of the titanium alloy substrate 3, which are the first piezoelectri...
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