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Multispectral Superconducting Nanowire Single Photon Detector

A single-photon detector and superconducting nanowire technology, applied in the field of photoelectric detection, can solve the problems of high absorption efficiency, unable to meet the needs of multi-spectral detection, etc.

Active Publication Date: 2021-08-20
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a multi-spectral superconducting nanowire single photon detector, which is used to solve the problem that the superconducting nanowire single photon detector in the prior art can only work in a single wavelength band. Achieving high absorption efficiency, unable to meet the needs of multi-spectral detection

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  • Multispectral Superconducting Nanowire Single Photon Detector
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  • Multispectral Superconducting Nanowire Single Photon Detector

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Embodiment 1

[0045] see figure 1 , the present invention provides a multispectral superconducting nanowire single photon detector, the multispectral superconducting nanowire single photon detector comprising: a substrate 10; a first optical thin film stack structure 11, the first optical thin film The laminated structure 11 is located on the upper surface of the substrate 10; the second optical film laminated structure 12, and the second optical film laminated structure 12 is located on the upper surface of the first optical film laminated structure 11; the The central wavelength of the second optical film stack structure 12 is different from the central wavelength of the first optical film stack structure 11; superconducting nanowires 13, the superconducting nanowires 13 are located in the second optical film stack structure 12 on the upper surface. The multi-spectral superconducting nanowire single photon detector of the present invention is provided between the superconducting nanowir...

Embodiment 2

[0066] Please combine Figure 1 to Figure 6 refer to Figure 7 to Figure 9 , this embodiment also provides a multispectral superconducting nanowire single photon detector, the specific structure of the multispectral superconducting nanowire single photon detector described in this embodiment is the same as that of the multispectral superconducting nanowire The specific structure of the conductive nanowire single photon detector is roughly the same, the difference between the two is that in the first embodiment, the first optical thin film stack structure 11 includes SiO 2 Optical thin film layer 111 and TiO 2 The optical thin film layer 112, the second optical thin film stack structure 12 may include SiO stacked up and down in sequence 2 Optical thin film layer 111 and TiO 2 Optical thin film layer 112; and in this embodiment, the first optical thin film stack structure 11 includes SiO stacked up and down in turn 2 The optical thin film layer 111 and the Si optical thin fi...

Embodiment 3

[0069] Please combine Figure 1 to Figure 6 refer to Figure 10 to Figure 12 , this embodiment also provides a multispectral superconducting nanowire single photon detector, the specific structure of the multispectral superconducting nanowire single photon detector described in this embodiment is the same as that of the multispectral superconducting nanowire The specific structure of the conductive nanowire single photon detector is roughly the same, the difference between the two is that in the first embodiment, the first optical thin film stack structure 11 includes SiO 2 Optical thin film layer 111 and TiO 2 The optical thin film layer 112, the second optical thin film stack structure 12 may include SiO stacked up and down in sequence 2 Optical thin film layer 111 and TiO 2 Optical thin film layer 112; and in this embodiment, the first optical thin film stack structure 11 includes SiO stacked up and down in turn 2 Optical thin film layer 111 and Ta 2 o 5 The optical t...

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Abstract

The invention provides a multispectral superconducting nanowire single photon detector, comprising: a substrate; a first optical thin film stack structure located on the upper surface of the substrate; a second optical thin film stack structure located on the first optical thin film stack The upper surface of the layer structure; the central wavelength of the second optical thin film stack structure is different from the central wavelength of the first optical thin film stack structure; the superconducting nanowire is located on the upper surface of the second optical thin film stack structure. The second optical film stack structure of the present invention is used as a reflector to achieve high-efficiency absorption at its center wavelength, and also plays a role in phase shifting the light in the reflection band of the first optical film stack structure, causing its absorption wavelength to change. The number of offset and absorption peaks increases, and efficient absorption of multiple bands can be achieved, that is, multiple resonance absorption wavelengths can be obtained, thereby meeting the user's application requirements for single-photon detectors of different bands, as well as multi-band imaging or multi-band detection and other application requirements.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and relates to a superconducting nanowire single photon detector, in particular to a multispectral superconducting nanowire single photon detector. Background technique [0002] Superconducting nanowire single photon detector (SNSPD) is a new type of single photon detection technology developed in the past ten years. Its biggest advantage over semiconductor detectors is its ultra-high detection efficiency and fast response. speed with negligible dark counts, and a spectral response spanning visible to infrared. In 2001, the Gol'tsman group of Moscow Normal University first prepared a 200nm-wide superconducting nanowire by using a 5nm-thick NbN ultra-thin film, successfully realized single-photon detection from visible light to near-infrared, and opened the single-photon detection of superconducting nanowires. The first of its kind in photon detectors. Since then, many countries ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/09H01L31/0232H01L31/0352
CPCH01L31/02327H01L31/035227H01L31/09
Inventor 李浩尤立星王河清王镇
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI