Piezoelectric stack pump

Abstract

The invention belongs to the field of microfluid delivery, and particularly relates to a piezoelectric stack pump. An outlet hole, an inlet hole, two or more body cavities and air storage chambers with the same number as the body cavities are formed in a pump body, and the diameters of all the body cavities are decreased sequentially from the inlet hole to the outlet hole; inlet cavities and outlet cavities communicating with the air storage chambers are formed in the body cavities, the outlet hole and the inlet hole communicate with the outlet cavities and the inlet cavities of the adjacent body cavities correspondingly, and the inlet cavities and the outlet cavities of every two adjacent body cavities communicate mutually; the inlet cavities, the outlet cavities and valve plates mountedin the inlet cavities and the outlet cavities constitute inlet valves and outlet valves; a pump cover is mounted on the pump body, a diaphragm is pressed between the pump cover and the pump body, guiding holes of the pump cover and the body cavities are symmetrically configured on the two sides of the diaphragm, and sealing rings are connected into the body cavities by the diaphragm in a pressed mode to form a pump cavity; pistons are connected to the diaphragm in a pressed mode by piezoelectric stacks in the guiding holes; each piezoelectric stack comprises a driving unit and a sensing unit;and the driving units and the sensing units of all the piezoelectric stacks are connected with a driving power supply through independent wire sets, and when direct-current driving voltage acts on thedriving units, the driving units enable the driving voltage to be reversed according to the changing situation of the induction voltage of the sensing units.

Description

technical field [0001] The invention belongs to the field of trace gas transmission and control, in particular to a piezoelectric stack pump. Background technique [0002] Micro gas compression and delivery devices are also called micro air compressors, pumps, gas compression devices, etc., and are mainly used for gas sampling, gas circulation and supply, jet cooling, negative pressure maintenance, inflation boosting, oxygenation and many other aspects. According to the working principle, commonly used gas compression devices can be divided into diaphragm type, electromagnetic type, impeller type, piston type, etc., and their common characteristics are that they all include mechanical transmission parts, so the structure is complex, the volume, weight and power consumption are large, and there are The large noise and electromagnetic interference are not convenient for the miniaturization and integration of the structure, and the application in the field of micro-electromecha...

AI Technical Summary

Problems solved by technology

Although the structure, principle and performance of the above-mentioned gas compression and delivery devices are quite different, they are all driven by the bending deformation of the wafer-shaped piezoelectric vibrator under the action of an electric field, and the volume change of the pump chamber caused by the bending deformation of the piezoelectric vibrator The volume is relatively small, and the output flow and pressure that can be realized by the existing piezoelectric gas compression device are still very low, especially the large output flow and high output pressure cannot be obtained at the same time, so the popularization and application are restricted to a certain extent

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