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Gasification pressurization system for silane filling

A pressurization system and silane technology, applied in pressure vessels, container filling methods, container discharge methods, etc., can solve problems such as leakage in the pressurization process, and achieve secondary pollution, reduce energy consumption, and reduce equipment investment. cost effect

Pending Publication Date: 2019-05-07
内蒙古兴洋科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the present invention provides a silane-filled gasification pressurization system, which solves the problem of easy leakage in the pressurization link, reduces equipment investment costs, and reduces energy consumption

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  • Gasification pressurization system for silane filling
  • Gasification pressurization system for silane filling

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Embodiment Construction

[0026] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0027] See attached figure 1 , the embodiment of the present invention discloses a silane-filled gasification booster system, comprising: a silane gasification tank 1 and a gasifier 2;

[0028] One end of the silane gasification tank 1 is connected to the silane storage tank, and the other end is connected to the gasifier 2; the other end of the gasifier 2 is connected to the cylinder filling system;

[0029] A liquid level gauge 3 is installed on the silane ...

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Abstract

The invention discloses a gasification pressurization system for silane filling. The gasification pressurization system comprises a silane gasification tank and a gasifier; one end of the silane gasification tank is connected with a silane storage tank, and the other end of the silane gasification tank is connected to the gasifier; the other end of the gasifier is connected to a steel cylinder filling system; a liquid level gauge is mounted on the silane gasification tank; and a pressure gauge is mounted on the gasifier. The silane gasification tank and the gasifier realize gasification and pressurization of liquid silane, it is not necessary to separately pressurize the silane with a compressor, the problem that leakage of the silane is prone to happening is solved, zero secondary pollution of the electronic grade silane is achieved, meanwhile, the equipment investment cost is reduced, and energy consumption is reduced.

Description

technical field [0001] The invention relates to the technical field of silane gasification and pressurization, in particular to a silane-filled gasification pressurization system. Background technique [0002] Silane, also known as monosilane, silicon tetrahydrogen, molecular formula SiH 4 , SiH 4 It is a strong reducing substance, and it will show strong activity when it contacts with oxidizing substances, alkali or heavy metal salt solution. It is a flammable and explosive dangerous gas. Silane is the basic raw material for the production of a series of silicon compounds such as monocrystalline silicon, polycrystalline silicon, amorphous silicon, metal silicide, silicon nitride, silicon carbide and silicon oxide, and is widely used in the electronics and semiconductor industries. [0003] At present, traditional silane gasification and pressurization generally use compressors for pressurization. This kind of process equipment requires large investment, high energy consum...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C7/04F17C13/00
Inventor 陶刚义
Owner 内蒙古兴洋科技股份有限公司