Coated silicon-based electronic cigarette atomization chip and making method thereof
An electronic cigarette and chip technology, which is applied in the field of electronic cigarettes, can solve the problems of uneven heating of atomization chips, large fluctuations in the number of suction ports and smoke volume, etc.
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Embodiment 1
[0061] The structure of the coated silicon-based vaping chip in this embodiment is as follows:
[0062] A silicon substrate 1 is provided with an array of microcolumns 2 and an inlet port 13 and an outlet port 14 on the silicon substrate 1. The outer wall of the microcolumn 2 is a coated sidewall, and the array of microcolumns 2 defines several microfluidic channels 12;
[0063] Glass cover 5, which is provided with air holes 6 that run through the glass cover 5;
[0064] The glass cover 5 is fixedly connected to the silicon substrate 1 by anodic bonding process.
[0065] In this embodiment, an electroplating method is used to coat the outer wall of the microcolumn 2, and nickel is used as the coating metal.
Embodiment 2
[0067] The structure of the coated silicon-based vaping chip in this embodiment is as follows:
[0068] A silicon substrate 1, an array of microholes 3 and an inlet port 13 and an outlet port 14 are arranged on the silicon substrate 1, the inner wall of the microholes 3 is a coated inner wall, and the silicon substrate 1 is provided with a smoke liquid flow channel through the microholes 3 15;
[0069] Glass cover 5, which is provided with air holes 6 that run through the glass cover 5;
[0070] The glass cover 5 is fixedly connected to the silicon substrate 1 by anodic bonding process.
[0071] In this embodiment, the electroless plating method is used to coat the inner wall of the microhole 3, and the coating metal used is Ni-P alloy.
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