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Cleaning device for LED chips

A technology for light-emitting diodes and cleaning devices, which is applied in the manufacturing of electrical components, circuits, semiconductor/solid-state devices, etc., can solve problems such as low cleaning efficiency, and achieve the effect of improving cleaning efficiency and avoiding low cleaning efficiency.

Active Publication Date: 2021-01-12
HC SEMITEK ZHEJIANG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, LED chips are usually cleaned manually, and the cleaning efficiency is low.

Method used

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  • Cleaning device for LED chips
  • Cleaning device for LED chips
  • Cleaning device for LED chips

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Experimental program
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Effect test

Embodiment Construction

[0024] In order to make the object, technical solution and advantages of the present invention clearer, the implementation manner of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0025] figure 1 It is a structural schematic diagram of a cleaning device for light-emitting diode chips provided by an embodiment of the present invention. Such as figure 1 As shown, the cleaning device includes a base 10 , a wafer ring carrier 20 , a manipulator 30 , a turntable 40 and a first swing arm 50 .

[0026] The wafer ring carrier 20 is located on the base 10 , and the wafer ring carrier 20 is used to carry the wafer ring. The turntable 40 is rotatably arranged on the base 10 , and the turntable 40 is spaced apart from the wafer ring carrier 20 . The first swing arm 50 is rotatably connected to the base 10 , and the rotation axis of the first swing arm 50 is parallel to the rotation axis of the turntable 40 .

[0027] ...

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PUM

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Abstract

The invention discloses a cleaning device of a light emitting diode chip, belonging to the technical field of semiconductors. The cleaning device includes a base, a wafer ring carrier, a manipulator,a turntable and a first swing arm, wherein the wafer ring carrier is located on the base, the wafer ring carrier is used for carrying wafer rings, the turntable is rotationally arranged on the base, the turntable and the wafer ring carrier are distributed at intervals, the first swing arm is rotationally connected to the base, the rotation axis of the first swing arm is parallel to the rotation axis of the turntable, a first cleaning head is arranged on the first swing arm, the first cleaning head is located above the turntable, the manipulator is arranged on the base and located between the wafer ring carrier and the turntable, and the manipulator is used for transferring the wafer rings carried by the wafer ring carrier to the turntable in a controllable manner. Since the first cleaninghead is arranged on the first swing arm, the LED chips placed on the turntable can be cleaned by the first cleaning head, the problem of low cleaning efficiency caused by manual cleaning can be avoided, and the cleaning efficiency can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a cleaning device for light-emitting diode chips. Background technique [0002] LED (Light Emitting Diode, Light Emitting Diode) has the advantages of small size, long life, low power consumption, etc., and is currently widely used in automobile signal lights, traffic signal lights, display screens and lighting equipment. [0003] When making LEDs, it is necessary to make epitaxial wafers first, and then make the epitaxial wafers into LED chips. During the manufacturing process, certain pollution will inevitably be formed on the LED chip, so the LED chip needs to be cleaned after the LED chip is manufactured. [0004] At present, LED chips are usually cleaned manually, and the cleaning efficiency is low. Contents of the invention [0005] An embodiment of the present invention provides a cleaning device for LED chips, which can improve the cleaning efficiency of LED ch...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/673H01L21/687
Inventor 林晓文高百卉
Owner HC SEMITEK ZHEJIANG CO LTD
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