Parallel micro-motion platform with multi-stage linkage output

A technology of micro-motion platform and output platform, which is applied in the field of micro-motion platform, can solve the problems of insufficient output table, limited operating space, small output stroke, etc., and achieves the effects of easy guarantee of processing accuracy, high guiding precision and large output table

Active Publication Date: 2020-12-25
NINGBO UNIV
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing micro-motion platforms are easy to design, most of which are two degrees of freedom, and can only output displacement along the x and y axes; although it includes an amplification mechanism, its magnification is small, so the output stroke is also small; and the effective output The table is not big enough to limit the operating space

Method used

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  • Parallel micro-motion platform with multi-stage linkage output
  • Parallel micro-motion platform with multi-stage linkage output
  • Parallel micro-motion platform with multi-stage linkage output

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Embodiment Construction

[0027]The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the embodiments described below are part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0028]SeeFigure 1-Figure 8As shown, a parallel micro-motion platform with multi-stage linkage output is characterized in that it includes a working platform 12, a fixed rod 10, a base 15 and three flexible amplifying unit structures;

[0029]Each of the flexible amplifying unit structures includes a frame and two piezoelectric stack drivers A;

[0030]The frame is divided by wire cutting into a fixed block 1, an output platform 2, two output rods 5, two rockers 7, tw...

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Abstract

A parallel micro-motion platform with multi-stage linkage output, which relates to a micro-motion platform, which includes a working platform, a fixed rod, a base and three flexible amplifying unit structures; each of the flexible amplifying unit structures includes a frame and two presses. Electric stack driver; the frame is separated by wire cutting into a fixed block, an output platform, two output rods, two rockers, two amplifying rods one, two amplifying rods two, two amplifying rods three, and two Guide rod 1, multiple guide rods 2 and multiple frame bodies; a piezoelectric stack driver capable of driving the output rod is installed on the frame body, the fixed block is connected to the base through the fixed rod, and the working platform and the output platform connect. The invention has simple structure, reasonable design, convenient assembly and disassembly, and improves the working displacement of the working platform.

Description

Technical field[0001]The invention relates to a micro-motion platform, in particular to a parallel micro-motion platform with multi-stage linkage output.Background technique[0002]The parallel micro-motion platform with multi-stage linkage output is a micro-displacement mechanism that transmits force and displacement through a flexible hinge mechanism that can produce elastic deformation and can move in translation with multiple degrees of freedom. It is driven by a piezoelectric actuator, so its displacement resolution is high, the response speed is fast, the driving force is large, the rigidity is large, the volume is small, and the bearing capacity is strong. Therefore, it plays an increasingly important role in the technical fields that require micro / nano positioning, such as precision processing and measurement, optical fiber docking, microelectronic engineering, and cell micromanipulation. In the field of ultra-precision machining, it can provide the tool with micro-nano-level ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81C99/00
Inventor 陈永杰杨依领张义民吴高华黎贵江娄军强洪松
Owner NINGBO UNIV
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