Multi-degree-of-freedom motion platform based on double primary linear motors

A linear motor and motion platform technology, applied in the direction of electric components, electrical components, electromechanical devices, etc., can solve the problems of low positioning accuracy, slow dynamic response, complex structure, etc., and achieve high positioning accuracy, fast dynamic response, and simple system structure Effect

Inactive Publication Date: 2019-05-28
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention aims to solve the problems of complex structure, slow dynamic response and low positioning accuracy in existing devices for realizing multi-degree-of-freedom positioning motion

Method used

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  • Multi-degree-of-freedom motion platform based on double primary linear motors
  • Multi-degree-of-freedom motion platform based on double primary linear motors
  • Multi-degree-of-freedom motion platform based on double primary linear motors

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Experimental program
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Effect test

Embodiment 1

[0037] refer to Figure 1 to Figure 4 The multi-degree-of-freedom motion platform with double-primary unilateral linear motors performs two-degree-of-freedom positioning motion structure and reference in the horizontal plane xoy Figure 5 to Figure 6 The multi-degree-of-freedom motion platform with double-primary bilateral linear motors performs two-degree-of-freedom positioning motion structure in the horizontal plane xoy to specifically illustrate this embodiment 1. The connecting rod in the motion platform can move around the kinematic pair (2) in the horizontal plane Free rotation, the relative position between the two moving primary stages remains unchanged, and when moving in one direction at the same speed, the positioning table 1 can perform positioning movement in the y direction.

[0038] refer to Figure 1 to Figure 6 , the multi-degree-of-freedom motion platform with double-primary linear motors in the present embodiment 1 includes a linear motor with double-actin...

Embodiment 2

[0048] refer to Figure 7 to Figure 10 The multi-degree-of-freedom motion platform with double-primary unilateral linear motors performs positioning motion in the yoz plane structure and reference Figure 11 to Figure 12 The multi-degree-of-freedom motion platform with double-primary bilateral linear motors performs positioning motion in the yoz plane to specifically illustrate this embodiment 2. The connecting rod in the motion platform can freely rotate around the kinematic pair 2 in the vertical plane, and the two The relative position between each moving primary remains unchanged, and when moving in one direction at the same speed, the positioning table 1 can perform positioning movement in the z direction.

[0049] refer to Figure 7 to Figure 10 , the multi-degree-of-freedom motion platform with double-primary linear motors in this embodiment 2 includes a linear motor with double-acting primary, a positioning platform 1, 3 connecting rods and a plurality of kinematic pa...

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Abstract

The invention discloses a multi-degree-of-freedom motion platform based on double primary linear motors, and relates to the field of linear motors. The invention aims to solve the problems of complexstructure, slow dynamic response and low positioning precision of the existing device for realizing multi-degree-of-freedom positioning motion. Kinematic pairs can ensure that connecting rods can freely rotate in a horizontal plane or a vertical plane; the fixed heights of the kinematic pairs are different; the relative position between a movable primary part A and a movable primary part B is notchanged; when moving in one direction at the same speed, a positioning table can perform positioning motion in the movement direction of the primary parts; the relative position between the two movable primary parts is changed; under the action of the three connecting rods, the positioning table can perform positioning movement in the direction perpendicular to the movement direction of the movable primary parts, and therefore by changing the relative position, the movement direction and the movement speed of the two primary parts, two-degree-of-freedom positioning movement of the positioningtable on the horizontal plane xoy or the vertical plane yoz can be achieved. The device is used for realizing multi-degree-of-freedom positioning motion.

Description

technical field [0001] The invention relates to a multi-degree-of-freedom motion platform based on double primary linear motors. It belongs to the field of linear motors. Background technique [0002] At present, in the high-end industrial technology fields such as integrated circuits, CNC machine tools, and precision measurement, the demand for multi-degree-of-freedom positioning movements is increasing. The traditional realization of multi-degree-of-freedom positioning motion generally adopts a stacking scheme, that is, the combination of multiple single-degree-of-freedom motion actuators is used to realize it. There are two typical mechanisms, one is based on a rotating motor plus a ball screw, and the other is One is based on linear motors. In order to achieve two-degree-of-freedom plane motion, no matter which scheme is adopted, the x-direction drive motor needs to be located above the y-direction drive motor, which is essentially an accumulation from low-dimensional ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02K41/02
Inventor 张赫寇宝泉王论寒罗俊葛庆稳
Owner HARBIN INST OF TECH
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