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Anti-down-sliding auxiliary locking device for crucible lifting frame of monocrystalline silicon growth furnace

A technology of locking device and growth furnace, which is applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve problems such as not considered, and achieve the effect of ensuring safety and eliminating the risk of whereabouts

Pending Publication Date: 2019-06-04
ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this technical solution can only ensure that the brake mechanism of the brake motor can complete the locking of the ball screw under normal and stable working conditions, and does not take into account the situation when there is a certain probability of accidents

Method used

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  • Anti-down-sliding auxiliary locking device for crucible lifting frame of monocrystalline silicon growth furnace
  • Anti-down-sliding auxiliary locking device for crucible lifting frame of monocrystalline silicon growth furnace
  • Anti-down-sliding auxiliary locking device for crucible lifting frame of monocrystalline silicon growth furnace

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Embodiment Construction

[0021] The specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0022] Such as figure 1 As shown, an anti-sliding auxiliary locking device for a crucible lifting frame of a single crystal silicon growth furnace includes a driving mechanism, an auxiliary locking device 2 and a ball screw screw lifter 5 .

[0023] The driving mechanism includes a driving motor 1 and a control element, and the driving motor 1 is a driving motor 1 with a brake.

[0024] The auxiliary locking device 2 includes a steering gear 7 , a pawl 9 and a ratchet 10 . Steering gear 7 is arranged on frame 6, is connected with ratchet 9 by first transmission shaft 13, and the top of ratchet 9 tip is connected with spring 8 one end by screw, and the other end of spring 8 is connected with frame 6 by screw. The ratchet 10 is arranged on the side of the ratchet 9, and the center is connected to the second transmission shaft 12...

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Abstract

The invention relates to the field of monocrystalline silicon preparation equipment, and relates to an anti-down-sliding auxiliary locking device for a crucible lifting frame of a monocrystalline silicon growth furnace. The anti-down-sliding auxiliary locking device comprises a driving mechanism, the driving mechanism comprises a driving motor and a control element, the auxiliary locking device comprises a steering engine, a pawl and a ratchet wheel; the steering engine is arranged on a machine frame and is connected with the pawl through a first transmission shaft, the top of the tip of the pawl is connected with one end of a spring, the other end of the spring is connected with the machine frame, the ratchet wheel is arranged beside the pawl, the center of the ratchet wheel is connectedwith a second transmission shaft, and the two ends of the transmission shafts are respectively connected with the driving motor and a ball screw spiral elevator through couplings. The control elementis respectively connected with the driving motor and the steering engine. According to the invention, the function of preventing down sliding can be provided for the crucible lifting frame installed on a ball screw by a contracting brake motor, an additional auxiliary locking function is provided, in an actual production process, the anti-down-sliding auxiliary locking device can ensure possible falling risks are avoided in the lifting and descending process of the crucible lifting frame, and the safety of the production process is ensured.

Description

technical field [0001] The invention relates to the field of single crystal silicon preparation equipment, and relates to an anti-sliding auxiliary locking device for a crucible lifting frame of a single crystal silicon growth furnace. Background technique [0002] Monocrystalline silicon is the most basic material in electronic information materials and photovoltaic industries, and the Czochralski method single crystal furnace is the key technical equipment for producing silicon single crystal. During the production process of the single crystal furnace, it is necessary to complete the lifting of the crucible lifting frame, thereby driving the lifting of the crucible in the main furnace chamber of the single crystal furnace. In this process, it is necessary to ensure that the crucible lifting frame will not slide down when it is stopped. action. [0003] The existing technical solution is that in the crucible lifting mechanism, the driving part directly uses the brake moto...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/30C30B29/06
Inventor 曹建伟傅林坚胡建荣高宇倪军夫叶钢飞春伟博谭庆冯贤剑
Owner ZHEJIANG JINGSHENG MECHANICAL & ELECTRICAL
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