A straightness error measuring device based on light gap method and its application method
A technology of straightness error and measuring device, which is applied in the field of precision measurement, can solve the problems of three-coordinate measuring instrument, which is not portable, expensive, and unable to perform online measurement, etc., and achieves broad market application prospects, low cost, and simple measurement Effect
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[0031] Taking the measurement of the straightness error of a 300mm×300mm high-precision flat plate by using a 400mm refined knife-edge ruler as an example, the specific implementation method of the present invention is described.
[0032]1) Parts are refined first before assembly. In order to improve the accuracy of the 400mm commodity 0-level knife-edge ruler, a 300mm×300mm high-precision grinding plate with a flatness error of less than 0.5μm after grinding is used to refine the knife-edge ruler, which can more than double the accuracy of the knife-edge ruler. The straightness error of the final 400mm 0-level knife-edge ruler is not more than 0.5 μm; use the above-mentioned high-precision grinding plate to fix the slotted end cover 1-1, end cover 1-2, and rear plate 1-4 of the knife-edge ruler clamping device 1 The bottom surface and the clamping surface 1-6 are refined. After refinement, the flatness error of the bottom surface of the slotted end cover 1-1 and the end cover...
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