Test circuit and method for semiconductor device
A technology for testing circuits and testing methods, which is applied in semiconductor/solid-state device testing/measurement, semiconductor devices, semiconductor/solid-state device components, etc., and can solve problems such as test result influence and leakage current
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[0024] In an existing manufacturing process of a semiconductor device, a protection device is usually used to protect the semiconductor device. For example, protective diodes are used to avoid plasma damage.
[0025] Specifically, when a semiconductor device is manufactured by processes such as plasma etching, plasma may remain. For example, when manufacturing N-type metal-oxide-semiconductor (N-Metal-Oxide-Semiconductor, NMOS), there will be plasma remaining at the gate.
[0026] refer to figure 1 , figure 1 It is a schematic diagram of a test circuit of a semiconductor device in the prior art. The semiconductor device can be an NMOS device 11, and the test circuit of the semiconductor device can include:
[0027] a protection device, the first end of the protection device is grounded, and the second end is connected to the gate of the NMOS device 11;
[0028] The test power supply 13 is used for providing test voltage during the test.
[0029] Specifically, the protect...
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