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A device for mutual calibration among multiple nanometer displacement sensors

A displacement sensor and sensor technology, applied in the sensor field, can solve the problems of insufficient stroke, large volume, and inapplicability of nano-scale displacement sensors, and achieve the effect of high accuracy, compact structure, and avoiding measurement interference.

Active Publication Date: 2021-01-01
阿米精控科技(山东)有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The inventors found that the current calibration device for nanometer displacement sensors is either too large in volume, insufficient in stroke, too low in resolution, or complex in structure, and is not suitable for calibration of nanoscale displacement sensors, let alone realize mutual calibration between various nanometer sensors

Method used

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  • A device for mutual calibration among multiple nanometer displacement sensors
  • A device for mutual calibration among multiple nanometer displacement sensors
  • A device for mutual calibration among multiple nanometer displacement sensors

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Embodiment Construction

[0024] The present disclosure will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] It should be noted that the following detailed description is exemplary and intended to provide further explanation of the present disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs.

[0026] It should be noted that the terminology used herein is only for describing specific embodiments, and is not intended to limit the exemplary embodiments according to the present disclosure. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof.

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Abstract

The invention provides an apparatus for mutually calibrating various nano displacement sensors. The apparatus comprises a displacement platform, wherein the displacement platform comprises a movable platform and a stationary platform, and the movable platform is connected with a piezoelectric device; the piezoelectric device is used for converting a control voltage to a drive force so as to drivethe movable platform to move; the movable platform is provided with a first reflection mirror, and the stationary platform is provided with a second reflection mirror; the movable platform moves, so that laser emitted by a laser interference instrument generates variable interference fringes after being reflected by the first reflection mirror and the second reflection mirror; and the displacementplatform is provided with at least one of an unipolar capacitance sensor, a grating displacement sensor and a bipolar capacitance sensor, the laser interference instrument, the unipolar capacitance sensor, the grating displacement sensor and the bipolar capacitance sensor can acquire the displacement variation data of the movable platform, so that the mutual calibration between at least one of the unipolar capacitance sensor, the grating displacement sensor and the bipolar capacitance sensor and the laser interference instrument can be realized.

Description

technical field [0001] The disclosure belongs to the technical field of sensors, and in particular relates to a device for mutual calibration among various nanometer displacement sensors. Background technique [0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art. [0003] With the development of science and technology, more and more equipment or devices widely use displacement sensors for measurement, and at the same time put forward higher requirements for displacement sensors. As one of the core technologies in the field of sensors, the calibration of displacement sensors has a crucial impact on the measurement accuracy of sensors. [0004] At present, the main nano-displacement sensors include laser interferometers, grating displacement sensors, unipolar capacitive sensors and bipolar capacitive sensors. The laser interferometer uses light waves as the carrier, and has ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
Inventor 陈志龙
Owner 阿米精控科技(山东)有限公司
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