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Automatic handling operation system

An operating system and automatic technology, applied in the field of handling operating systems, can solve the problems of high risk, many special gases, and high process automation

Inactive Publication Date: 2019-06-25
MARKETECH INT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the characteristics of semiconductor factories are: 1. There are many special gases, which are highly dangerous, and more than 30 kinds of flammable / corrosive / toxic special gases; 2. Process automation is getting higher and higher

Method used

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  • Automatic handling operation system
  • Automatic handling operation system
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Examples

Experimental program
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Effect test

Embodiment Construction

[0018] see Figure 1 to Figure 5 , which shows a schematic front view of the automatic transport operating system of this embodiment, which mainly includes: a frame 1, a multi-directional sliding device 2 containing a sensing element 21 (sensing element) and a linear unit 3.

[0019] One side of the frame 1 is provided with a track 11 , and the bottom surface of the frame 1 is provided with at least one rolling device to provide a barrel 4 (barrel) to move from an entrance 12 to a pick-up area 13 of the frame 1 with low resistance ; An unmanned guided vehicle (Automatic Guided Vehicle) receives a material shortage signal via a wired or wireless connecting line, and the unmanned guided vehicle automatically transports the material from a take-out place in a storage zone (storage zone). barrel material 4 to the entrance 12 of the frame 1;

[0020] In the past, it is known that the storage area of ​​the drum material 4 has a storage space where a drum material 4 is taken out at ...

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Abstract

The present invention provides an automatic handling operation system, which is mainly composed of a frame, a multi-directional sliding device including a sensing element, and a linear unit; the frameis provided with a track on one side thereof; the multi-directional sliding device including the sensing element is disposed on the frame and the track, and supports a multi-degree-of-freedom arm operation mixing action at two supporting positions so as to identify an interface position coordinate and a take-over position coordinate of a barrel cover in a barrel image by using the sensing element; the linear unit is disposed on the frame and provides an accordance coordinate driving the multi-directional sliding device and the multi-degree-of-freedom arm to operate so that the multi-degree-of-freedom arm open and close an interface or a take-over is driven to open and close the interface and then the effect that the take-over is fixed to the interface or separated from the interface is obtained.

Description

technical field [0001] The invention relates to an automatic handling operating system, in particular to a handling operating system which has the advantages of full automation and the like. Background technique [0002] At present, the characteristics of semiconductor factories are: 1. There are many special gases, which are highly dangerous, and there are more than 30 kinds of flammable / corrosive / toxic special gases; 2. The process automation is getting higher and higher. [0003] The types of chemicals used in semiconductor factories can generally be classified as follows: ① Acid: HCl, HNO 3 、H 2 SO 4 、H 3 PO 4 , 49% HF, 115uBHF, 1200BHF, 120HF, 0.5% HF, Ecopeeler, etc. ②Caustic: 2.8% Developer, NH 4 OH, ELM-C30, etc. ③ Organic solvent (Solvent): IPA, EKC265, 10% IPA, PGMEA+PGME, etc. ④ Oxidation (Oxygen): H 2 o 2 . [0004] The HDPE blue chemical drums of the drum system (Drum System) take into account the maintenance of a clean and safe supply environment and...

Claims

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Application Information

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IPC IPC(8): B65G47/90
Inventor 罗思源陈俊杰倪启修
Owner MARKETECH INT
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