Multi-cavity bidirectional piezoelectric pump excited by piezoelectric transducer and pumping method thereof
A piezoelectric transducer and multi-cavity technology, applied to parts of pumping devices for elastic fluids, pumps with flexible working elements, pumps, etc., can solve problems such as small output pressure and flow
Active Publication Date: 2019-07-05
HARBIN INST OF TECH
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Problems solved by technology
[0004] In order to solve the technical problem that the output pressure and flow rate of the existing active valve control piezoelectric micropump using piezoelectric film vibrators are relatively small, the present invention discloses a multi-cavity bidirectional piezoelectric pump excited by piezoelectric transducers. Pumps and their pumping methods
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[0082] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0083] Reference attached Figure 1-Figure 12 , The present invention provides a multi-cavity bidirectional piezoelectric pump excited by a piezoelectric transducer. The multi-cavity bidirectional piezoelectric pump is a multi-cavity bidirectional piezoelectric pump excited by a flexural vibration piezoelectric transducer. , Including valve cavity cover plate 1, pump cavity cover plate 2, pump body 3, two valve cavity bending vibration transducers 4, ...
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The invention discloses a multi-cavity bidirectional piezoelectric pump excited by a piezoelectric transducer and a pumping method thereof, and belongs to the field of fluid machinery. The multi-cavity bidirectional piezoelectric pump is characterized in that valve cavity cover plates, a pump cavity cover plate and a pump body are sequentially connected, two valve cavity elastic thin films are arranged at the bottoms of through holes of the two valve cavity cover plates, the tail ends of two valve cavity bending transducers are rigidly connected with the centers of the surfaces of the two valve cavity elastic thin films, a pump cavity elastic thin film is arranged at the bottom of a through hole of the pump cavity cover plate, the head end of a pump cavity bending vibration transducer is fixed in the pump cavity cover plate through a bending vibration transducer connecting piece, the tail end of the pump cavity bending vibration transducer is rigidly connected with the lower surface ofthe pump cavity elastic thin film, two valve cavity annular sealing rings are tightly pressed on the pump body through the valve cavity cover plates and the two valve cavity elastic thin films, and apump cavity annular sealing ring is tightly pressed and fixed under the pump body through the pump cavity cover plate and the pump cavity elastic thin film. According to the multi-cavity bidirectional piezoelectric pump excited by the piezoelectric transducer and the pumping method thereof, an adopted piezoelectric transducer vibrator has the advantages of being large in output force, high in response speed, free of electromagnetic interference and the like, and can realize the micro-liquid transfer of large pressure and flow.
Description
Technical field [0001] The invention belongs to the field of fluid machinery, and particularly relates to a multi-cavity bidirectional piezoelectric pump excited by a piezoelectric transducer and a pumping method thereof. Background technique [0002] Piezoelectric pump is a new type of fluid driver. It uses the inverse piezoelectric effect to deform the piezoelectric vibrator, which causes the volume of the pump cavity to change and a pressure difference occurs, thereby realizing fluid output. A traditional hydraulic pump is composed of a drive source, a pump body, and vanes that directly act on the liquid, while a piezoelectric pump can integrate the drive source, transmission part, and pump body of the traditional hydraulic pump into one. Compared with traditional hydraulic pumps, piezoelectric pumps have many advantages such as small volume and weight, simple structure, fast response, no electromagnetic interference, low energy consumption, and small flow controllable. It is ...
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Login to View More IPC IPC(8): F04B43/04F04B53/10F04B53/00
CPCF04B43/046F04B53/00F04B53/10
Inventor 刘英想李恒禹陈维山刘军考李锴
Owner HARBIN INST OF TECH