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Microwave breath sensor for early diagnosis of lung cancer and preparation method thereof

A breathing sensor and early diagnosis technology, applied in microwave sensors, evaluating respiratory organs, nanotechnology for sensing, etc., can solve the problem of low sensitivity of gas sensor, achieve improved detection performance, high consistency and repeatability , Highly Feasible Effects

Active Publication Date: 2021-05-25
王琮
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of low sensitivity of the existing gas sensor, and provide a microwave respiration sensor for early diagnosis of lung cancer based on semiconductor micromachining technology and its preparation method

Method used

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  • Microwave breath sensor for early diagnosis of lung cancer and preparation method thereof
  • Microwave breath sensor for early diagnosis of lung cancer and preparation method thereof
  • Microwave breath sensor for early diagnosis of lung cancer and preparation method thereof

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specific Embodiment approach 1

[0022] Specific Embodiment 1: The microwave breath sensor for early diagnosis of lung cancer based on semiconductor micromachining technology in this embodiment includes gas sensitive material 1-4, micro heater 3, reference sensor 4-1, detection sensor 4-2, and substrate 7 , micro heater 3 and encapsulation material 8, AAO layer 6 is arranged on the front of substrate 7, and SiO is arranged on AAO layer 6 2 Layer 5, SiO 2 Layer 5 is processed into a reference sensor 4-1 and a detection sensor 4-2 using MEMS technology. The microwave resonant circuit of the sensor 4-2 is the same, and the microwave resonant circuit is encapsulated by the packaging material 8;

[0023] In the microwave resonant circuit area, a heat conduction channel is opened along the thickness direction of the substrate 7 and the AAO layer 6, and a heat conduction metal 2 is electroplated in the heat conduction channel, and a micro heater 3 is integrated on the back of the substrate 7;

[0024] The microwav...

specific Embodiment approach 2

[0028] Embodiment 2: The difference between this embodiment and Embodiment 1 is that the encapsulation material 8 is PDMS material (polydimethylsiloxane).

specific Embodiment approach 3

[0029] Specific embodiment three: the difference between this embodiment and specific embodiment one is that the barrier metal in the gas-sensitive material 1-4 is gold, platinum or palladium; the metal oxide nanowire is SnO 2 Nanowires, TiO 2 nanowires, ZnO nanowires, In 2 o 3 Nanowire, WO 3 Nanowires, Fe 2 o 3 Nanowire, Ag 2 O nanowires or La 2 o 3 Nanowires.

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Abstract

A microwave breath sensor for early diagnosis of lung cancer based on semiconductor microprocessing technology and a preparation method thereof, the invention belongs to the field of microwave detection, and aims to solve the problem of low sensitivity of existing gas sensors. The microwave breathing sensor of the present invention deposits AAO layer and SiO on the substrate sequentially 2 layer, on SiO 2 The MEMS process is used to process the reference sensor and the detection sensor with the same circuit on the layer, and the heat-conducting metal is plated along the thickness direction of the substrate and the AAO layer, and the micro-heater is integrated on the back of the substrate. The gap where the electromagnetic energy is coupled between the strip line and the split resonator ring. The invention realizes the high-sensitivity detection of toluene at room temperature, realizes the detection of 1ppm level toluene, and the sensitivity is as high as 7.44MHz / ppm. The microwave breathing sensor can work without high temperature or ultraviolet irradiation, and has excellent detection sensitivity and stability sex.

Description

technical field [0001] The invention belongs to the field of microwave detection, and in particular relates to a nanomaterial-modified microwave breath sensor detected at room temperature and a preparation method thereof, which can realize the detection of volatile organic compounds (VOCs), which are markers of lung cancer. Background technique [0002] The concept of breath detection has been around for a long time. In the four aspects of traditional Chinese medical examination methods - looking, smelling, asking, and feeling, "smell" occupies a very important position. Experienced Chinese medicine practitioners can smell the patient's breath to detect Judge the condition. With the continuous development of non-destructive medical diagnosis, breath detection, as one of the important methods of non-destructive testing, has attracted more and more attention. Respiratory detection is mainly to find one or several respiratory gases that are highly related to the disease and an...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N22/00B82Y15/00A61B5/08
CPCA61B5/08A61B2562/0228B82Y15/00G01N22/00
Inventor 王琮
Owner 王琮
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