Infrared window film getter and preparation method thereof

A technology of infrared windows and getters, which is applied in the fields of electrical components, climate sustainability, and final product manufacturing. It can solve problems such as process complexity and high cost, particles affecting device reliability, and long delivery cycle. Low cost, not easy to particles, large suction effect

Inactive Publication Date: 2019-07-05
合肥晶鼎光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002] Infrared focal plane detectors need to be packaged in high vacuum. How to ensure the high vacuum degree and reliability inside the device is a key technical problem for manufacturers. The realization of high vacuum must be solved by using getters. At present Most of the getters used by domestic infrared manufacturers need to rely on imports. There are problems such as long delivery cycle and high cost. Domestic getters also have various deficiencies. Similar to this type of getters, the process is complicated The degree and cost will be high, and it is easy to produce particles that affect the reliability of the device

Method used

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  • Infrared window film getter and preparation method thereof
  • Infrared window film getter and preparation method thereof
  • Infrared window film getter and preparation method thereof

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Embodiment Construction

[0030] In describing the present invention, it is to be understood that the terms "central", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", The orientation or positional relationship indicated by "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device Or elements must have a certain orientation, be constructed and operate in a certain orientation, and thus should not be construed as limiting the invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these featu...

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Abstract

The invention discloses an infrared window film getter. The infrared window film getter comprises a base layer, a Cr coating, a microstructure layer Cu, a zirconium-based getter and a nickel protective layer, wherein the Cr coating is plated on the surface of the base layer; the microstructure layer Cu is plated on the surface of the Cr coating and on the side, far away from the base layer, of theCr coating; the zirconium-based getter is plated on the surface of the microstructure layer Cu and on the side, far away from the Cr coating of the microstructure layer Cu; and the nickel protectivelayer is plated on the surface of the zirconium-based getter and on the side, far away from the microstructure layer, of the zirconium-based getter. The getter produced by the invention has large airsuction amount, high reliability and difficult particle generation, can be produced in a large scale, and has high process consistency and low cost, the getter is activated by vacuum heating, and theactivation process is simple and easy to operate.

Description

technical field [0001] The invention relates to the technical field of getters, in particular to an infrared window film getter and a preparation method thereof. Background technique [0002] Infrared focal plane detectors need to be packaged in high vacuum. How to ensure the high vacuum degree and reliability inside the device is a key technical problem for manufacturers. The realization of high vacuum must be solved by using getters. At present Most of the getters used by domestic infrared manufacturers need to rely on imports. There are problems such as long delivery cycle and high cost. Domestic getters also have various deficiencies. Similar to this type of getters, the process is complicated The degree and cost will be high, and it is easy to produce particles that affect the reliability of the device. [0003] To sum up, how to make the getter less likely to generate particles is an urgent technical problem to be solved at present. Contents of the invention ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0203H01L31/18H01L31/08G01J5/04C23C14/16C23C14/02
CPCC23C14/025C23C14/16G01J5/045H01L31/0203H01L31/08H01L31/18Y02P70/50
Inventor 周东平王莹
Owner 合肥晶鼎光电科技有限公司
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