SCF flow controller and control method
A flow controller and controller technology, applied in the field of SCF flow controller and control, can solve the problems of high manufacturing cost, complex structure, reduced precision and control ability, etc.
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[0016] Below in conjunction with accompanying drawing and specific embodiment the present invention will be described in further detail: Figure 1 to Figure 2 As shown, an SCF flow controller includes a controller body 4, the controller body 4 is provided with a working chamber 41, and the side wall of the working chamber 41 is connected with an intake solenoid valve 1 and an exhaust solenoid valve 2; A piston head 51 is movably arranged in the working chamber 41 , and the piston head 51 can change the volume of the working chamber 41 by the action of the driving mechanism. An air pressure sensor 42 is arranged at one end of the working chamber 41 .
[0017] Described driving mechanism comprises stepping motor 31, and described stepping motor 31 ends are provided with driving gear 32, and described driving gear 32 is engaged with driven gear 33, and described driving gear 32 and described driven gear 33 are driven The linear displacement is limited; the axial center of the dri...
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