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Test system

A test system and detector technology, which is applied in the direction of single semiconductor device testing, measuring electricity, measuring devices, etc., can solve the problems of reduced measurement accuracy, increased wiring inductance components, etc., and achieve the effect of shortening the transfer time

Active Publication Date: 2019-07-16
SINTOKOGIO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a possibility that the inductance component of the wiring increases and the measurement accuracy decreases.

Method used

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Embodiment Construction

[0021] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in the description of the drawings, the same reference numerals are assigned to the same elements, and overlapping descriptions are omitted.

[0022] figure 1 It is an external view schematically showing the test system of the first embodiment. figure 2 is along figure 1 Sectional view of line II-II. image 3 yes figure 1 A top view of the test system. Figure 4 (a) is a diagram briefly showing a state where the probe holder is holding the probe unit. Figure 4 (b) is a diagram schematically showing a state where the probe unit is detached from the probe holder. Figure 1 ~ Figure 3 The shown test system 1 is a system for performing an electrical characteristic test of a DUT (Device Under Test: Device Under Test) 2 as a device under test.

[0023] As DUT2, the bare chip of a semiconductor element, a semiconductor module, etc. are mentioned, ...

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Abstract

This test system tests the electrical characteristics of a device to be tested, wherein the test system comprises: a mount on which the device to be tested is mounted; a transport mechanism for transporting the mount; a test head that includes a measurement circuit for testing electrical characteristics; a probe for connecting an electrode of the device to be tested to the measurement circuit; a raising and lowering mechanism that moves the mount along a first direction, thereby bringing the electrode and the probe into and out of contact with each other; and an alignment mechanism provided tothe test head, the alignment mechanism moving the probe on a plane orthogonal to the first direction, thereby positioning the probe and the electrode on said plane.

Description

technical field [0001] The present invention relates to testing systems. Background technique [0002] A test system for inspecting devices such as power semiconductors is known. For example, Patent Document 1 describes a probe system including a chuck table for holding a device, and a probe for connecting terminals of a tester to electrodes of the device. In this detection system, the chuck table can move along the 3-axis and can rotate around the Z-axis, and the detector is fixed on the tester fixed table. When inspecting equipment using this chuck table, the equipment held by the chuck table is photographed, and the chuck table is rotated so that the electrode of the equipment is aligned with the position of the front end of the detector, and the After moving in the X-axis and Y-axis directions, it rises in the Z-axis direction to bring the probe into contact with the electrodes. [0003] Patent Document 1: Japanese Unexamined Patent Publication No. 2006-317346 [000...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/26H01L21/66
CPCG01R31/2891G01R31/2887G01R31/2886G01R31/2893G01R31/2889G01R1/0408G01R1/0491G01R1/07342
Inventor 浜田贵之坂本阳一
Owner SINTOKOGIO LTD