A Compensation Method for Angle Measuring Error of Circular Grating
An error compensation and circular grating technology, applied in the field of circular grating angle measurement error compensation, can solve problems such as high cost and immature commercial products, and achieve the effects of saving costs, improving product reliability, and improving angle measurement accuracy.
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[0028] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.
[0029] Such as figure 1 As shown, a circular grating angle measurement error compensation method includes the following steps:
[0030] 1) After placing the circular grating angle measurement system in a constant temperature box 4 at 10°C and waiting for 2 hours, use the photoelectric autocollimator 1 and the hardware data acquisition system to collect the circular grating angle measurement system in combination with the polygonal prism 2 installed on the shaft body 3. Angle data; continue to heat up, measure a set of angle measurement data every 5°C until the set temperature is reached; set the temperature range of the thermostat to 10-40°C. A shaft body is arranged on the rotary joint of the circular grating angle measurement system, and a single reading head is installed on the shaft body.
[0031] 2) Ac...
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