Laser triangulation thickness measuring instrument and method based on side focal line method

Abstract

The invention belongs to the field of laser thickness measurement, and discloses a side focal line method laser triangle thickness gauge and a method. The side focal line method laser triangle thickness gauge comprises a transmitting unit and a receiving unit, the transmitting unit comprises a first transmitting component and a second transmitting component which are located above and under the side of a to-be-measured object and are symmetrical around a central plane of the to-be-measured object, the first transmitting component is used for forming a light plane I, the light plane I and an upper surface of the to-be-measured object form a first straight line spot and generate diffuse reflection on the upper surface of the to-be-measured object, the second transmitting component is used for forming a light plane II coplanar to the light plane I, the light plane II intersects with a lower surface of the to-be-measured object to form a second straight light spot and generates diffuse reflection at the lower surface of the to-be-measured object; the receiving unit is located beside the to-be-measured object, an optical axis of the receiving unit is perpendicular to the light plane I,and the receiving unit is used for receiving diffuse reflection light of upper and lower surfaces of the to-be-measured object, and obtaining thickness of the to-be-measured object according to the diffuse reflection light. The side focal line method laser triangle thickness gauge and the method provided by the invention have the advantages of being simple in structure, accurate in measurement, and so on.

Description

technical field [0001] The invention belongs to the field of laser thickness measurement, and more specifically relates to a side focal line method laser triangulation thickness measurement instrument and method. Background technique [0002] Generally speaking, thickness measurement methods in geometric dimension measurement technology can be divided into contact measurement and non-contact measurement. Contact measurement is a measurement method that obtains measurement information such as thickness and length by directly contacting measuring tools or instruments such as scales or screw micrometers with the measured object. Non-contact measurement is based on photoelectric, electromagnetic and other technologies to obtain measurement information without touching the surface of the measured target. Common non-contact measurement methods include galvanometric method, electrolytic method, magnetic induction thickness measurement method, metallographic microscope method, ray ...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the above defects or improvement needs of the prior art, the present invention provides a side focal line laser triangulation thickness gauge and method, which solves the problem of The structure of the existing thickness gauge is easy to be bumped and scratched by the measured object. At the same time, the line measurement is realized by forming a straight line spot, which solves the problem of large measurement error and inaccurate measurement in the existing point measurement. It has the advantages of simple structure and accurate measurement. , especially for thin plate thickness measurement

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