A method and device for eliminating spurious fringes based on band-stop filtering of characteristic spectrum
A technology of band-stop filtering and characteristic spectrum, which is applied in the field of spurious fringe elimination methods and devices, can solve the problems of reducing the extraction accuracy of the removal function and the evaluation of the modification ability of the interference removal function, and achieves fast calculation, wide application range, and easy popularization and application Effect
Active Publication Date: 2022-03-08
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology
[0007] In view of the above problems, the purpose of the present invention is to solve the problem of introducing parasitic fringes in the detection of magneto-rheological removal function interferometers to reduce the extraction accuracy of removal function and the evaluation of the modification ability of interference removal function
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Embodiment 1
[0093] For example, the magnetorheological removal function is measured by a ZYGO static interferometer, the sampling spot substrate is Φ50mm, the detection data aperture is Φ48mm, and the material is fused silica, which introduces more obvious parasitic fringes during the interference detection process.
[0094] Specifically, the interferometer spot measurement surface data matrix containing parasitic fringes is obtained, the data width pixel number m=864, the data height pixel number n=864, and the pixel size is pix=0.052mm, such as image 3 shown.
[0095] Calculate the spectrum magnification factor of the surface data matrix according to steps i~ii:
[0096] i Calculate the spatial period T=1.07mm of the spurious stripes and the angle α=38 degrees of the spurious stripes relative to the X-axis (horizontal axis, positive direction to the right), such as Figure 4 shown;
[0097] ii Calculate the magnification
[0098] Perform Quad Flip operation on the surface data mat...
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The invention discloses a method and device for eliminating spurious fringes based on characteristic spectrum band-rejection filtering. The method includes: acquiring the data matrix f(x, y) of the interferometer sampling spot measurement surface shape containing the spurious fringes; calculating the correlation of the spurious fringes Parameters and the surface shape data matrix f (x, y) spectrum magnification N; according to the relevant parameters and magnification N, the frequency spectrum and frequency domain characteristics of the spurious stripes are processed to generate spectrum data; the spectrum data Carry out FFT inverse transformation to get the surface shape data that eliminates spurious fringes. This method only eliminates the spectrum of the parasitic stripes, completely retains the spectrum of the removal function itself, and does not change the shape of the removal function itself, so that while filtering out the parasitic stripes, the shape of the removal function itself is maintained, and the extraction of the magnetorheological removal function is improved. precision.
Description
technical field [0001] The invention relates to the field of optical processing, in particular to a method and device for eliminating parasitic fringes based on characteristic spectrum band-stop filtering. Background technique [0002] Magneto-rheological polishing technology is a high-certainty, high-precision optical ultra-precision processing technology, which is widely used in the polishing of large-diameter planar optical elements, the molding of continuous phase plates (CPP), and the fine polishing of aspheric optical elements. The accuracy of magnetorheological removal function extraction is a key factor to determine the precision and efficiency of magnetorheological machining. At present, the production process of magnetorheological removal function is usually to first use a small flat substrate to collect spots on a magnetorheological fluid machine tool, and then use an optical interferometer to detect the reflection or transmission surface shape of the sampled subs...
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IPC IPC(8): G06F17/14G06F30/20
CPCG06F30/20
Inventor 唐才学温圣林颜浩张远航嵇保建王翔峰石琦凯邓燕王健李昂
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS