All-electrically regulated multifunctional spin-orbit torque device and preparation method
A spin-orbit and spin-orbit coupling technology is applied in the field of spintronics, which can solve the problems of increasing the complexity of device design and miniaturizing device power consumption.
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[0051] In the first exemplary embodiment of the present disclosure, a method for preparing a fully electrically regulated multifunctional spin-orbit torque device is also provided. figure 2 It is a flow chart of the preparation method of the all-electrically regulated multifunctional spin-orbit torque device according to the embodiment of the present invention. Such as figure 2 shown, including:
[0052] Put the semi-insulating GaAs(001) substrate into the MBE preparation chamber, and the vacuum degree of the chamber is higher than 2×10-7Pa. After degassing and deoxidation, the temperature of the substrate was raised to 560° C., and a GaAs smooth layer was deposited with a growth rate of 10 nm / min and a thickness of 200 nm.
[0053] Lower the temperature of the substrate to 150-250°C to grow a ferrimagnetic binary alloy D0 with perpendicular magnetic anisotropy 22 -Mn 3 Ga, with a growth rate of about 1nm / min and a thickness of 40nm, raised to 300°C and kept for 20min to...
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