Three-dimensional force detection system based on three-axis fast tool servo mechanism
A technology of servo mechanism and detection system, which is applied in the direction of manufacturing tools, measuring/indicating equipment, metal processing machinery parts, etc., can solve the problems such as difficult to process the surface microstructure of free optical curved surface, and realize the processing of complex surface microstructure and high sensitivity , the effect of high degree of freedom
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[0029] In order to further understand the present invention, the preferred embodiments of the present invention are described below in conjunction with the examples, but it should be understood that these descriptions are only for further illustrating the features and advantages of the present invention, rather than limiting the claims of the present invention.
[0030] The embodiment of the present invention provides a three-dimensional force detection system based on a three-axis fast tool servo mechanism. Among them, the structure diagram of the three-axis fast tool servo mechanism with integrated force sensor is as follows figure 1 shown. The structure mainly includes an X-axis drive unit (including an X-axis piezoelectric ceramic driver 13, an X-axis guide flexible hinge 12, an X-axis lateral buffer Hooke hinge 11, and an X-axis piezoelectric ceramic force sensor 10), a Y-axis drive unit ( Including Y-axis piezoelectric ceramic driver 4, Y-axis guide flexible hinge 5, Y-...
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