Incremental absolute grating ruler-based absolute displacement detection method

A technology of absolute grating ruler and absolute displacement, which is applied in measuring devices, optical devices, instruments, etc., can solve the problems of inability to increase the allowable measurement speed, reduction of displacement measurement accuracy, physical model error, etc., to solve the contradiction between speed and accuracy. , Improve the accuracy and stability, eliminate the effect of manufacturing errors
CN110260795AActive Publication Date: 2019-09-20FOSHAN HUADAO SUPER PRECISION TECH CO LTD
8 Cites 7 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
FOSHAN HUADAO SUPER PRECISION TECH CO LTD
Publication Date
2019-09-20

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention discloses an incremental absolute grating ruler-based absolute displacement detection method. The method included the following steps that: an incremental type grating ruler is marked, so that the incremental type grating ruler can be converted into an incremental absolute grating ruler, and the uniqueness of each grid line is guaranteed; grating images are collected and de-noised, and the grid lines of the grating ruler are extracted, a neural network model for deep learning is established, each grid line is trained, and the trained neural network model is stored; a mathematical model for displacement detection is established, the image of a grating ruler to be subjected to displacement detection is collected, and the trained neural network model is used for carrying out grid line recognition, and a recognized grid line number is fed back to the mathematical model, so that a displacement detection value can be calculated. According to the method of the invention, the incremental type grating ruler is converted into the incremental absolute grating ruler; the functions of the absolute grating ruler are realized through an incremental mode; and the manufacturing precision of the grating ruler is greatly reduced.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to the technical field of grating ruler displacement detection, in particular to a displacement detection method for converting incremental stripes into absolute codes. Background technique

[0002] With the continuous improvement of the integration of microelectronic products, higher speed and precision requirements are put forward for the displacement detection system of microelectronic manufacturing equipment.

[0003] With the development of microfabrication technology, especially the continuous improvement of the integration of microelectronic products, the size of its component components is reduced accordingly. In the process of processing and mounting these components, the positioning accuracy of microelectronic manufacturing equipment Higher requirements are put forward, and the precision measurement system is required to develop towards high precision and high speed. Therefore, it is of great significance to improve the...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More