Incremental absolute grating ruler-based absolute displacement detection method

Abstract

The invention discloses an incremental absolute grating ruler-based absolute displacement detection method. The method included the following steps that: an incremental type grating ruler is marked, so that the incremental type grating ruler can be converted into an incremental absolute grating ruler, and the uniqueness of each grid line is guaranteed; grating images are collected and de-noised, and the grid lines of the grating ruler are extracted, a neural network model for deep learning is established, each grid line is trained, and the trained neural network model is stored; a mathematical model for displacement detection is established, the image of a grating ruler to be subjected to displacement detection is collected, and the trained neural network model is used for carrying out grid line recognition, and a recognized grid line number is fed back to the mathematical model, so that a displacement detection value can be calculated. According to the method of the invention, the incremental type grating ruler is converted into the incremental absolute grating ruler; the functions of the absolute grating ruler are realized through an incremental mode; and the manufacturing precision of the grating ruler is greatly reduced.

Description

technical field [0001] The invention relates to the technical field of grating ruler displacement detection, in particular to a displacement detection method for converting incremental stripes into absolute codes. Background technique [0002] With the continuous improvement of the integration of microelectronic products, higher speed and precision requirements are put forward for the displacement detection system of microelectronic manufacturing equipment. [0003] With the development of microfabrication technology, especially the continuous improvement of the integration of microelectronic products, the size of its component components is reduced accordingly. In the process of processing and mounting these components, the positioning accuracy of microelectronic manufacturing equipment Higher requirements are put forward, and the precision measurement system is required to develop towards high precision and high speed. Therefore, it is of great significance to improve the...

AI Technical Summary

Problems solved by technology

Through the application of digital image processing technology, the speed of displacement measurement is effectively improved, the manufacturing requirements of displacement sensors are reduced, and the cost and installation requirements are reduced. However, these methods have physical model errors and environmental noise interference, which greatly reduces the displacement measurement accuracy.

On the other hand, the document "A high-resolution and high-response grating nano-measurement subdivision method" proposes a high-resolution, high-response grating nano-measurement subdivision method-dynamic tracking subdivision method. When measuring resolution, the frequency response speed is 100kHz, but the allowable speed of measurement is only 0.5mm / s, which still cannot improve the allowable speed of measurement

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