Defect confirmation device, defect confirmation method, and computer-readable storage medium
A technology for confirming devices and defects, applied in computing, measuring devices, still image data browsing/visualization, etc., can solve problems such as easy missing, user fatigue, and missing, and achieve the effect of not easy to fatigue and improve the accuracy of confirmation
Inactive Publication Date: 2019-09-24
DAINIPPON SCREEN MTG CO LTD
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Problems solved by technology
[0007] However, in the technology of the above-mentioned Patent Document 1, for example, when observing and comparing the inspection image and the reference image, since the line of sight moves between the inspection image and the reference image, real defects may be missed.
Furthermore, for example, due to the accumulation of user fatigue due to the movement of the line of sight, etc., it may be easy to miss the real defect
That is, the confirmation accuracy of the work of confirming defects may be reduced
Method used
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no. 1 approach
[0087] (1-1. Outline of Defect Inspection System)
[0088] figure 1 It is a figure which shows the schematic structure of an example of the defect confirmation system 100 which includes the defect confirmation apparatus 3 which concerns on 1st Embodiment. The defect confirmation system 100 has a configuration in which the inspection device 1 and the defect confirmation device 3 are communicably connected via the communication line 2 . As the communication line 2, various network lines such as LAN (Local Area Network) or public lines, or wired lines such as cables, etc. are applicable. The network line may be, for example, any network line capable of data communication between the inspection device 1 and the defect confirming device 3 using a predetermined communication protocol set in advance or the like. The communication line 2 may be connected to a plurality of inspection devices 1 , or may be connected to a plurality of defect confirmation devices 3 .
[0089] (1-2. Out...
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The purpose of the present invention is to improve confirmation accuracy in defect confirmation. Provided is a defect confirmation device for confirming the presence or absence of a defect on an object to be inspected, the defect confirmation device having an acquisition unit and an output control unit. The acquisition unit acquires defect image data in which defects are likely to be captured and reference image data as a reference for the same portion of the same size of the object to be inspected. The output control unit visually outputs the defect image data and the reference image data at least once in chronological order on the same display area through the output unit.
Description
technical field [0001] The invention relates to a defect confirmation device, a defect confirmation method and a computer-readable storage medium. Specifically, the present invention relates to techniques for inspecting various patterns such as wiring patterns on a printed circuit board, various patterns formed on substrates such as various masks such as resists used to manufacture printed circuit boards, and the like. In particular, the present invention relates to a technique for visually outputting, for example, an image of an inspection target object and a reference image serving as a reference for comparison. Background technique [0002] For example, a defect checking device for checking defects of various patterns on an object on which various patterns such as wiring patterns are formed on a substrate such as a printed board has been proposed (for example, refer to the description in Patent Document 1). [0003] In this defect confirmation device, for example, an ins...
Claims
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IPC IPC(8): G01N21/956G06F16/56G06F16/54
CPCG01N21/956G01N2021/95638G01N21/8851G06T7/001
Inventor 西原荣治
Owner DAINIPPON SCREEN MTG CO LTD