A polishing device and method based on confocal megasonic micro-jet

A polishing device and megasonic wave technology are applied in the field of optical component processing and ultra-precision optical surface processing, which can solve the problems of large surface energy, small nozzle hole size, affecting polishing quality, etc. Time response characteristics, effect of suppressing agglomeration effect
CN110293483BActive Publication Date: 2021-06-04成都精密光学工程研究中心
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
成都精密光学工程研究中心
Publication Date
2021-06-04

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Abstract

The invention discloses a polishing device and method based on confocal megasonic micro-jet, belonging to the field of ultra-precision optical surface processing. The polishing device includes a top cover, a megasonic transducer, a transducer cluster seat, a connecting seat, a liquid storage chamber, a sealing ring, and a nozzle, and the nozzle is provided with a small hole for ejecting the polishing liquid. In addition to the advantages of traditional jet polishing, the confocal megasonic wave micro-jet polishing device and method can suppress the agglomeration effect of polishing powder particles and improve Suspension and dispersion of the polishing liquid; in addition, compared with traditional jet polishing, the device and method have more controllable parameters, and different polishing spots can be realized by adjusting the power and frequency parameters of the megasonic transducer array , polishing efficiency, polishing quality, and has good time response characteristics.
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Description

technical field

[0001] The invention belongs to the field of optical element processing, and in particular relates to a polishing device and method based on confocal megasonic micro-jet, which is especially suitable for the fine polishing stage of optical elements, and also belongs to the field of ultra-precision optical surface processing. Background technique

[0002] Ultra-precision machining is one of the important indicators of the national manufacturing technology level. The precision, surface roughness, processing size range and geometric shape that can be achieved by ultra-precision machining directly determine the height that the manufacturing industry can achieve. In addition, ultra-precision machining is also an important pillar of advanced manufacturing technology and intelligent manufacturing technology. In the field of optics, the caliber and surface precision of optical components directly determine the performance of the optical system, and the ultra-precisio...

Claims

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