Detection device, evaporation system and detection method

Abstract

The invention discloses a detection device, an evaporation system and a detection method. The detection device is used for detecting the flatness of a to-be-detected substrate in the evaporation process; an induction layer is included, and can be arranged on the surface of a magnetic plate so that the magnetic plate can be used for attracting a mask plate; in the pasting process of the mask plateand the to-be-detected substrate, the induction layer can be pasted to the to-be-detected substrate, and the induction layer can generate an induction signal according to the flatness of the surface,pasted to the induction layer, of the to-be-detected substrate. According to the detection device, when the surface, pasted to the induction layer, of the to-be-detected substrate is not flat, the induction layer can generate the induction signal; through the induction signal, whether the surface, pasted to the induction layer, of the to-be-detected substrate is flat or not can be judged, then when it is detected that the surface of the to-be-detected substrate is not flat, evaporation on the to-be-detected substrate can stop in time, and waste of an evaporation material is avoided.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a detection device, an evaporation system and a detection method. Background technique [0002] The evaporation of the substrate of the display panel is usually carried out in a vacuum evaporation chamber. During the evaporation process, the substrate to be evaporated and the mask plate need to be aligned and pressed through the magnetic plate. If the substrate is attached to the surface of the magnetic plate Unevenness will affect the lamination effect, further affect the evaporation effect of the substrate to be evaporated, and finally affect the display effect of the display panel. [0003] Therefore, it is particularly important to detect the flatness of the surface of the substrate to be evaporated. Contents of the invention [0004] Embodiments of the present invention provide a detection device, a vapor deposition system and a detection method, aiming at de...

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Problems solved by technology

[0002] The evaporation of the substrate of the display panel is usually carried out in a vacuum evaporation chamber. During the evaporation process, the substrate to be evaporated and the mask plate need to be aligned and pressed through the magnetic plate. If the substrate is attached to the surface of the magnetic plate Unevenness will affect the lamination effect, which will affect the evaporation effect of the substrate to be evaporated, and finally affect the display effect of the display panel

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