A kind of LED point light source based on graphene/zno nanowire/p-gan film and preparation method thereof
A nanowire and graphene technology, applied in the field of semiconductor optics, can solve the problems affecting the electroluminescence performance of the heterojunction, and achieve the effect of reducing the size, enhancing the luminous intensity and large contact area
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[0043] The present invention will be further elaborated below through specific embodiments in conjunction with the accompanying drawings.
[0044] Such as image 3 and 4 As shown, the LED point light source based on the vertical structure of graphene / single ZnO nanowire / p-GaN film in this embodiment includes: growth substrate, p-GaN film layer a, positive electrode f, insulating layer b, groove , ZnO nanowire c, negative electrode e, and single-layer graphene d; wherein, a Mg-doped p-GaN film layer a with a thickness of about 1.75 μm is formed on the growth substrate, and the p-GaN film layer completely covers the growth substrate ; On the p-GaN thin film layer, a positive electrode f of Ni (10nm) / Au (50nm) is provided; on the p-GaN thin film layer, a thickness of about 100nm Al is formed except for the positive electrode 2 o 3 Insulating layer b, the insulating layer covers part of the p-GaN film layer except the positive electrode; a groove is arranged on the insulating l...
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