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A method for sub-pixel size calibration of particle pollutants on the surface of large-aperture mirrors

A large-aperture mirror and surface particle technology, applied in the field of engineering optics, can solve the problem of low precision and achieve the effect of improving the calibration precision

Active Publication Date: 2022-03-11
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of low accuracy of the existing pixel-level size calibration method, and propose a sub-pixel size calibration method for large-aperture mirror surface particle pollutants

Method used

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  • A method for sub-pixel size calibration of particle pollutants on the surface of large-aperture mirrors
  • A method for sub-pixel size calibration of particle pollutants on the surface of large-aperture mirrors
  • A method for sub-pixel size calibration of particle pollutants on the surface of large-aperture mirrors

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specific Embodiment approach 1

[0038] Specific implementation mode 1: In this implementation mode, the specific process of a sub-pixel size calibration method for particle pollutants on the surface of a large-aperture mirror is as follows:

[0039] For the detection of particle pollutants on the surface of large-aperture mirrors, the detection method of dark field imaging is adopted. The high-brightness linear array light source is installed on both sides of the front surface of the mirror, and irradiates on both sides of the mirror at a low angle. The mirror surface, the imaging system is installed on the front surface of the mirror and facing the mirror surface. If there are particle pollutants on the surface of the mirror, the reflected light of the particle pollutants will be incident on the photosensitive element of the imaging system, while the light in other areas cannot enter the imaging system, thus forming a bright object image under a dark background, the control system Image processing can be pe...

specific Embodiment approach 2

[0047] Specific embodiment 2: The difference between this embodiment and specific embodiment 1 is that in the first step, the entire light-transmitting area is divided into 4×4 sub-areas, and a calibration plate with the same size as the sub-area is prepared, and the calibration plate Silica particles of different sizes are preset on the top; the specific process is:

[0048] Step 11, using a pure black opaque plexiglass plate to make a calibration plate with the same size as the sub-area to reduce the impact of stray light on the size calibration results of particle pollutants;

[0049] Step 12. Make the calibration plate generate static electricity by friction, etc., and use different sizes of SiO 2 The particles are evenly sprinkled on the surface of the calibration plate, and the static electricity of the calibration plate will adsorb SiO 2 Granular, guaranteed SiO 2 The particle position does not change.

[0050] Other steps and parameters are the same as those in Embo...

specific Embodiment approach 3

[0051] Specific embodiment 3: The difference between this embodiment and specific embodiment 1 or 2 is that in the step 2, the calibration plates are sequentially placed on different sub-regions that are evenly divided on the surface of the mirror, and the calibration plates in different areas are collected respectively Picture; the specific process is:

[0052] Step 21. Install the large-diameter reflector on the offline dark field detection device (the offline dark field detection device includes an outer frame, a reflector, a light source unit, a guide rail and an image monitoring unit. This offline dark field monitoring device can obtain different monitoring distances Monitoring images of particulate contamination on the surface of the lower reflector, such as Figure 8 ), and use the clamping device to pre-tighten;

[0053] The aperture of the commonly used optical element is within 100mm, but the aperture of the optical element used in this paper is more than 600mm, so ...

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Abstract

A method for calibrating the sub-pixel size of particle pollutants on the surface of a large-diameter reflecting mirror is aimed at solving the problem of low precision of the existing pixel-level size calibration method. The process is as follows: 1. Divide the entire optical field into 4×4 sub-areas, prepare a calibration plate with the same size as the sub-area, and preset silica particles of different sizes on the calibration plate; 2. Place the calibration plate in sequence Place it on different sub-regions evenly divided on the surface of the mirror, and collect the calibration plate pictures of different regions respectively; 3. Obtain the position coordinates, pixel area, pixel diameter, and total gray level information of particle pollutants in the image; 4. Measure the actual diameter and area of ​​particle pollutants under the ultra-depth-of-field microscope; 5. Train the pollutant area and diameter calibration model, and estimate the test sample by the trained pollutant area and diameter calibration model. The invention is used in the field of sub-pixel size calibration of surface particle pollutants.

Description

technical field [0001] The invention relates to a method for calibrating the sub-pixel size of particle pollutants on the surface of a mirror. The invention belongs to the field of engineering optics. Background technique [0002] The main driving device of laser inertial confinement fusion is a high-power solid-state laser device. The transmission mirror in the device mainly plays the role of changing the direction of the laser beam, and is one of the important optical components in the process of laser beam transmission. Due to the huge laser energy required for fusion ignition, there is a high requirement for the cleanliness of the mirror surface. However, during the transportation, installation, and operation of the mirror, particle pollutants will be adsorbed on the surface of the component, which will cause scattering effects, thermal effects, field effects, etc. on the laser beam, and ultimately affect the quality of the laser beam. Therefore, it is necessary to crys...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N15/02
CPCG01N15/0227G01N15/0211
Inventor 陈明君赵林杰张德志程健蒋晓东尹朝阳苗心向牛龙飞吕海兵刘昊
Owner HARBIN INST OF TECH
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