Substrate cleaning device
A technology for cleaning devices and substrates, applied in the manufacturing of electrical components, circuits, semiconductor/solid-state devices, etc., can solve problems such as product yield decline, and achieve the effect of ensuring product yield and improving cleaning effects.
Active Publication Date: 2021-07-23
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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Problems solved by technology
[0005] In the prior art, the ultra-high pressure micro-particle spray cleaning filter section (High Pressure Micro JetFilter House, HPMJ Filter House) in the cleaning equipment (Chemical Vapor Deposition High Density Cleaning, CVD HDC) before chemical film formation includes two filters, each One filter has a drainage port, and the drainage ports of the two filters are connected to a drainage pipeline. In the existing drainage pipeline, only one main drainage valve is arranged at the final drainage end, and the drainage outlet of the filter There is no valve. When the machine is working, there is a certain probability that the cleaning water will flow out of the drain of one filter, flow into the drain of another filter, and then flow out of the outlet of the other filter, which will cause the cleaning water to flow out. Unfiltered and directly used for cleaning, unfiltered water directly used for cleaning will bring impurities (Particles) to the substrate, resulting in a decrease in product yield
Method used
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[0037] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0038] see figure 1 and figure 2 , the present invention provides a substrate cleaning device, including a first filter 2, a second filter 3, a drainage pipeline 4 and several protection valves 5;
[0039] The drainage pipeline 4 includes a main pipe 41, a water outlet pipe 42 and several water inlet pipes 43; the first filter 2 includes a first water inlet 21, a first water outlet 22 and at least one first water outlet 23. The second filter 3 includes a second water inlet 31, a second water outlet 32 and at least one second water outlet 33; the main pipe 41 is provided with a water outlet 411 and several water inlets 412;
[0040] The first water inlet 21 is connected to the cleaning water, the first water outlet 22 is connected to the s...
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The invention provides a substrate cleaning device. The substrate cleaning device includes a first filter, a second filter, a drainage pipeline and several protection valves; the drainage pipeline includes a main pipe, a water outlet pipe and several water inlet pipes; the first filter includes a The first water inlet, a first water outlet and at least one first water outlet, the second filter includes a second water inlet, a second water outlet and at least one second water outlet; the main pipe is provided with a water outlet and several a water inlet; the first water inlet is connected to cleaning water, the first water outlet is connected to the second water inlet, and each first water outlet is connected to its corresponding water inlet through a water inlet; the second water outlet outputs filtered cleaning water Each second water outlet is connected to its corresponding water inlet hole through a water inlet pipe; one end of the water outlet pipe is connected to the water outlet hole, and the other end discharges waste water; each water inlet pipe is provided with a protection valve, and the The protection valve can ensure that the cleaning water is effectively filtered.
Description
technical field [0001] The invention relates to the field of display technology, in particular to a substrate cleaning device. Background technique [0002] In the field of display technology, flat-panel displays such as Liquid Crystal Display (LCD) and Organic Light Emitting Diode (OLED) displays have gradually replaced CRT displays, and are widely used in LCD TVs, mobile phones, personal digital assistants, digital Cameras, computer or laptop screens, etc. [0003] The display panel is an important part of LCD and OLED. Whether it is an LCD display panel or an OLED display panel, it usually has a thin film transistor (Thin Film Transistor, TFT) substrate. Taking the LCD display panel as an example, it is mainly composed of a TFT substrate, a color filter (CF) substrate, a liquid crystal layer and a sealant (Sealant) arranged between the two substrates, and its molding process generally includes: the front section Array (Array) process (thin film, yellow light, etching a...
Claims
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IPC IPC(8): H01L21/67
CPCH01L21/67011H01L21/67023
Inventor 黄陈辰
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD