Mating structure for superconducting quantum processor package and package body
A quantum processor and matching structure technology, applied in semiconductor devices, semiconductor/solid-state device components, electric solid-state devices, etc., can solve problems such as microwave resonance, poor grounding of fan-out circuit boards, and affecting the performance of superconducting quantum processors. , to achieve the effect of eliminating microwave resonance, improving grounding effect and improving performance
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[0030] In a first exemplary embodiment of the present disclosure, a mating structure for superconducting quantum processor packaging is provided.
[0031] figure 2 It is a schematic diagram of a matching structure used for packaging a superconducting quantum processor shown in an embodiment of the present disclosure.
[0032] refer to figure 2 As shown, the matching structure for superconducting quantum processor packaging of the present disclosure includes: a first packaging part 11; a second packaging part 13, which is arranged opposite to the first packaging part 11, and the second packaging part 13 A cavity is formed with the first package part 11; the fan-out circuit board 2 is located in the cavity and carried by the second package part 13; and the metal pad layer 3 is closely attached to the first package part 11 and Between the fan-out circuit boards 2, wherein the thermal expansion coefficient of the metal pad layer is smaller than the thermal expansion coefficien...
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