Liquid mouth distance positioning device and method, and single crystal furnace

A technology of positioning device and single crystal furnace, which is applied in the direction of single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problems of low precision, insufficient liquid port distance accuracy, crystal disconnection and so on.

Active Publication Date: 2019-12-10
NINGXIA LONGI SILICON MATERIALS
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  • Abstract
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  • Claims
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Problems solved by technology

[0004] However, in the prior art, the positioning of the liquid gap is mainly based on naked eye observation, which has low precision and large differe

Method used

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  • Liquid mouth distance positioning device and method, and single crystal furnace
  • Liquid mouth distance positioning device and method, and single crystal furnace
  • Liquid mouth distance positioning device and method, and single crystal furnace

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Embodiment Construction

[0031] In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0032] refer to figure 1 , shows one of the structural schematic diagrams of a liquid port distance positioning device of the present invention; as figure 1 As shown, the liquid opening distance positioning device 10 is arranged in the single crystal furnace, and the single crystal furnace includes: a housing, a heat shield 20 and a crucible 30 filled with silicon liquid, the heat shield 20 is located above the silicon liquid, and the heat shield 20 It can guide the argon gas to flow in a directional way to ensure that the silicon liquid and the crystal are always filled with argon gas, so that the silicon single crystal grows under the protection of the surrounding atmosphere.

[0033] In the embodiment of the present invention,...

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Abstract

The invention provides a liquid mouth distance positioning device and method, and a single crystal furnace. The liquid mouth distance positioning device is arranged in the single crystal furnace, whena light beam emitted by a transmitter is reflected by a reflector and overlapped with a positioning hole, a counter weight is positioned to an initial position, and controlled to fall down a preset distance so as to make the counter weight reach a target position, a position of a crucible is adjusted so as to make the liquid level of a silicon solution be in contact with the lower edge of a positioning piece, and the distance between the liquid level of the silicon solution and the lower edge of a heat shield is a preset liquid mouth distance in this moment so as to achieve the purpose of positioning the liquid mouth distance. According to the liquid mouth distance positioning device, by controlling the falling distance of the counter weight, the liquid mouth distance is determined, position accuracy of the liquid mouth distance is high, and probability of crystal line disconnection in the process of crystal drawing is reduced.

Description

technical field [0001] The invention relates to the technical field of single crystal furnaces, in particular to a liquid port distance positioning device and method and a single crystal furnace. Background technique [0002] With the continuous improvement of photovoltaic technology, monocrystalline silicon, which is the basic material of photovoltaic power generation, has developed rapidly. The Czochralski method is currently the main technology for growing monocrystalline silicon. Single crystal silicon is drawn by heating polycrystalline silicon in a single crystal furnace. [0003] Liquid port distance is the distance from the lower edge of the heat shield in the single crystal furnace to the liquid surface of the silicon liquid in the crucible. , or the finishing process, it is necessary to position the liquid opening distance to obtain an accurate liquid opening distance, so as to ensure that the temperature of the thermal field is constant during the crystal pulling ...

Claims

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Application Information

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IPC IPC(8): C30B15/20C30B29/06
CPCC30B15/20C30B29/06
Inventor 李小龙李强涂准
Owner NINGXIA LONGI SILICON MATERIALS
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