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Novel electrode structure for graphite boat, and graphite boat

A technology of electrode structure and graphite boat, which is applied in the direction of circuits, discharge tubes, electrical components, etc., to achieve the effect of reasonable design, consistent deposition rate, and increased film thickness

Pending Publication Date: 2020-01-03
TONGWEI SOLAR (ANHUI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to provide a novel electrode structure for graphite boats and graphite boats thereof, to solve the problems raised in the above-mentioned background technology, to improve the uniformity of film thickness at adjacent stations of the electrode structure, and to compensate for the film thickness of adjacent stations. The defect of poor thickness uniformity makes the overall deposition rate of the silicon wafer more consistent during coating, thereby improving the overall film thickness uniformity in the boat

Method used

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  • Novel electrode structure for graphite boat, and graphite boat
  • Novel electrode structure for graphite boat, and graphite boat
  • Novel electrode structure for graphite boat, and graphite boat

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] A graphite boat, comprising a graphite boat sheet 10 and an electrode structure, the graphite boat sheet 10 is connected to a graphite boat connecting block 2 through a graphite rod 1, the electrode structure includes a graphite rod 1 and a graphite connecting block 2, and the graphite rod 1 is plugged into a plurality of graphite connections Block 2 realizes detachable connection.

[0034] A new electrode structure for graphite boats, including a graphite rod 1 and a number of graphite connecting blocks 2, the electrode structure is formed by detachably plugging a graphite rod 1 with a plurality of graphite connecting blocks 2, the graphite rod 1 is a cylinder, and the graphite connecting blocks The block 2 is a cuboid, and a hollow groove 3 is opened through the graphite connecting block 2, as shown in the attached description. figure 2 And attached image 3 As shown, by opening the graphite connecting block 2 other than the graphite boat foot 6 and the slotted conn...

Embodiment 2

[0037] While the graphite rod 1 is inserted into the graphite connection block 2 to form an electrode structure, a slotted connection block 4 can also be plugged and connected to the graphite rod 1, and the slotted connection block 4 is provided with an insertion hole 7, and the insertion hole 7 It is used to cooperate with the graphite rod 1 for connection, and a strip-shaped groove 5 is opened in the slotted connection block 4 .

Embodiment 3

[0039] While the graphite rod 1 is plugged into the graphite connection block 2 to form the electrode structure, the graphite boat foot 6 can also be plugged and connected on the graphite rod 1, and the graphite boat foot 6 is provided with an insertion hole 7, and the insertion hole 7 is used for Cooperate with graphite rod 1 for connection.

[0040] Under the same process conditions and the same number of graphite boats used, the non-uniformity of the film thickness of the battery sheet produced by the embodiment of the present invention is smaller than that of the control group using the graphite connection block 2 with a solid structure. Nearly 2%, the formula for calculating the non-uniformity of film thickness: Film thickness unit: nm, the following table 1 will give a detailed description:

[0041] Table 1

[0042]

[0043] According to the data in Table 1 above, it can be known that compared with the film thickness data and inter-sheet uniformity in the control...

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Abstract

The invention discloses a novel electrode structure for a graphite boat. The novel electrode structure comprises a graphite rod and a plurality of graphite connecting blocks. The electrode structure is formed by detachably inserting the plurality of graphite connecting blocks into the graphite rod, wherein the graphite rod is a cylinder, the graphite connecting blocks are cuboids, and hollow grooves are formed in the graphite connecting blocks in a penetrating manner. The hollow groove is reasonable in design, and the graphite connecting blocks of the hollow structure raise the temperature ofa temperature zone near the electrode structure under the condition of the same heating time, so the film thickness of battery pieces at adjacent stations is increased, and the difference of film thickness uniformity in a battery piece boat is reduced; and moreover, reaction gas introduced from a furnace mouth can directly enter the graphite boat through the electrode structure, so the overall deposition rate is relatively consistent during silicon wafer coating, and overall film thickness uniformity in the boat is thus improved.

Description

technical field [0001] The invention relates to the technical field of photovoltaic solar cell production equipment, in particular to a novel electrode structure for a graphite boat and the graphite boat. Background technique [0002] Photovoltaic modules are components formed by connecting several solar cells in series and in parallel, and are an important part of the field of solar power generation. In the production process of solar cells, silicon wafers need to be coated with an anti-reflection silicon nitride film, so the uniformity of the silicon nitride film is highly required, and the temperature of each temperature zone of the furnace tube, coating power, coating pressure, etc. Both will affect the uniformity of the coating. With the optimization of the cell production process, the coating process scheme has been greatly optimized compared to before, but the uniformity control of the anti-reflection coating is still a problem that needs to be optimized. [0003] Th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/32H01L21/673H01L31/18
CPCH01J37/3244H01J37/32541H01J37/32715H01L21/67333H01L31/18Y02P70/50
Inventor 王利娟彭彪陆勇彭春林段少雷顾峰戎丹
Owner TONGWEI SOLAR (ANHUI) CO LTD